Y-Ba-Cu-O films by rf magnetron sputtering using single composite targets

Superconducting and structural properties

Sy-Hwang Liou, M. Hong, J. Kwo, B. A. Davidson, H. S. Chen, S. Nakahara, T. Boone, R. J. Felder

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

High Tc superconducting Y-Ba-Cu-O films have been produced by rf magnetron sputtering using single unreacted composite targets of Y 2O3, BaF2, and CuO powders. Transport measurements of the films showed a sharp resistive Tc (R=0) at 89 K and a metallic behavior of resistivity versus temperature. The films show preferred orientations when deposited on single-crystal SrTiO3 substrates (100) or (110) and followed by a post O2 annealing at 825 °C.

Original languageEnglish (US)
Pages (from-to)1735-1737
Number of pages3
JournalApplied Physics Letters
Volume52
Issue number20
DOIs
StatePublished - Dec 1 1988

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magnetron sputtering
composite materials
electrical resistivity
annealing
single crystals
temperature

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Y-Ba-Cu-O films by rf magnetron sputtering using single composite targets : Superconducting and structural properties. / Liou, Sy-Hwang; Hong, M.; Kwo, J.; Davidson, B. A.; Chen, H. S.; Nakahara, S.; Boone, T.; Felder, R. J.

In: Applied Physics Letters, Vol. 52, No. 20, 01.12.1988, p. 1735-1737.

Research output: Contribution to journalArticle

Liou, S-H, Hong, M, Kwo, J, Davidson, BA, Chen, HS, Nakahara, S, Boone, T & Felder, RJ 1988, 'Y-Ba-Cu-O films by rf magnetron sputtering using single composite targets: Superconducting and structural properties', Applied Physics Letters, vol. 52, no. 20, pp. 1735-1737. https://doi.org/10.1063/1.99716
Liou, Sy-Hwang ; Hong, M. ; Kwo, J. ; Davidson, B. A. ; Chen, H. S. ; Nakahara, S. ; Boone, T. ; Felder, R. J. / Y-Ba-Cu-O films by rf magnetron sputtering using single composite targets : Superconducting and structural properties. In: Applied Physics Letters. 1988 ; Vol. 52, No. 20. pp. 1735-1737.
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