Wet-chemical etching of Mn-Zn ferrite by focused Ar+-laser irradiation in H3PO4

Yong Feng Lu, M. Takai, S. Nagatomo, S. Namba

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Abstract

Maskless etching of Mn-Zn ferrite in H3PO4 aqueous solution by Ar+-ion laser irradiation has been investigated to obtain high etching rates and aspect-ratios of etched grooves. The etching processes have been found to be photochemical in the low laser power region and thermochemical in the high laser power region. High etching rates of up to 340 μm/s and an aspect-ratio of 30 for slab structures have been achieved. In the case of high aspect-ratio structure, the etching rate was limited by the low diffusion efficiency of etched products in the etchant. Periodic ripple structures have been observed under specific etching conditions.

Original languageEnglish (US)
Pages (from-to)319-325
Number of pages7
JournalApplied Physics A Solids and Surfaces
Volume47
Issue number4
DOIs
Publication statusPublished - Dec 1 1988

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Keywords

  • 81.40
  • 82.65

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)
  • Physics and Astronomy (miscellaneous)

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