Wavelength effects in the laser cleaning process

Yong Feng Lu, Wen Dong Song, Chong Kiat Tee, Daniel Siu Hung Chan, Teck Seng Low

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

The wavelength effects in the laser cleaning process were studied both theoretically and experimentally. As the reflectivity and absorption coefficient depend on laser wavelength, different wavelengths will result in different temperature distributions in a particle or a substrate so that various cleaning forces and efficiencies are induced in the laser cleaning process. For laser-induced removal of copper and aluminum particles from quartz surfaces, the cleaning efficiency is higher and the threshold fluence is smaller for a shorter wavelength under the same cleaning parameters. This is because laser irradiation at a shorter wavelength causes a higher temperature rise and induces a greater cleaning force in a copper or aluminum particle, which results in higher cleaning efficiency and lower threshold fluence. The theoretical analysis can successfully predict and explain the experimental results.

Original languageEnglish (US)
Pages (from-to)840-844
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume37
Issue number3 A
StatePublished - Mar 1 1998

Fingerprint

cleaning
Cleaning
Wavelength
Lasers
wavelengths
lasers
fluence
aluminum
Copper
Aluminum
copper
thresholds
Laser beam effects
Quartz
absorptivity
Temperature distribution
temperature distribution
quartz
reflectance
irradiation

Keywords

  • Adhesion force
  • Cleaning efficiency
  • Cleaning force
  • Laser cleaning
  • Particle and substrate
  • Threshold fluence
  • Wavelength effect

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Wavelength effects in the laser cleaning process. / Lu, Yong Feng; Song, Wen Dong; Tee, Chong Kiat; Chan, Daniel Siu Hung; Low, Teck Seng.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 37, No. 3 A, 01.03.1998, p. 840-844.

Research output: Contribution to journalArticle

Lu, Yong Feng ; Song, Wen Dong ; Tee, Chong Kiat ; Chan, Daniel Siu Hung ; Low, Teck Seng. / Wavelength effects in the laser cleaning process. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 1998 ; Vol. 37, No. 3 A. pp. 840-844.
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