Vertical 3-D integration of silicon waveguides in a Si-SiO2-Si-SiO2-Si structure

Richard A. Soref, Fereydoon Namavar, Elisabetta Cortesi, Lionel Friedman, Richard Lareau

Research output: Contribution to journalConference article

5 Citations (Scopus)

Abstract

We have built and tested new multiple-layer silicon optical waveguide structures that have applications in wafer-scale optical interconnects. A repeated sequence of oxygen implantation, annealing, and Si epitaxy was used to make 5-layer or 6-layer structures containing a pair of 2-μm-thick Si waveguide cores separated by 1200Å or 3700Å of SiO2. Coupled or uncoupled dual waveguiding at 1.3 μm was observed. Inter-guide coupling for this stacked, 3-D structure is analyzed here. Applications to all-silicon guided-wave optical interconnects are discussed.

Original languageEnglish (US)
Pages (from-to)408-421
Number of pages14
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume1389
DOIs
StatePublished - Apr 1 1991
EventMicroelectronic Interconnects and Packages: Optical and Electrical Technologies 1990 - Boston, United States
Duration: Nov 4 1990Nov 9 1990

Fingerprint

Optical interconnects
SiO2
Silicon
3D
Optical Interconnects
Waveguide
Waveguides
optical interconnects
Vertical
waveguides
Guided electromagnetic wave propagation
Optical waveguides
silicon
Epitaxial growth
Guided Waves
Implantation
Epitaxy
Optical Waveguides
Annealing
Oxygen

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Vertical 3-D integration of silicon waveguides in a Si-SiO2-Si-SiO2-Si structure. / Soref, Richard A.; Namavar, Fereydoon; Cortesi, Elisabetta; Friedman, Lionel; Lareau, Richard.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 1389, 01.04.1991, p. 408-421.

Research output: Contribution to journalConference article

Soref, Richard A. ; Namavar, Fereydoon ; Cortesi, Elisabetta ; Friedman, Lionel ; Lareau, Richard. / Vertical 3-D integration of silicon waveguides in a Si-SiO2-Si-SiO2-Si structure. In: Proceedings of SPIE - The International Society for Optical Engineering. 1991 ; Vol. 1389. pp. 408-421.
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