Variable angle spectroscopic ellipsometry: A non-destructive characterization technique for ultrathin and multilayer materials

John A. Woollam, Paul G. Snyder, Martin C. Rost

Research output: Contribution to journalArticle

52 Citations (Scopus)

Abstract

In the most commonly used form of ellipsometry, a monochromatic collimated linearly polarized light beam is directed at an angle φ{symbol} to the normal of a sample under study. The specularly reflected beam is, in general, elloptically polarized, and the state of polarization is analyzed using a second polarizer and photodetector. A rotating analyzer automated spectroscopic ellipsometer has been constructed in our laboratory. The angle of incidence can be set over a wide range of angles, with a precision and repeatibility of ±0.01°. A computer controls the monochromator, the azimuth of a stepper-motor-driven polarizer, a shutter, and the digitization of the detector signal. There are several other schemes used for acquiring ellipsometric data, and these are discussed in several sources. The purpose of this short review is to show how variable angle of incidence spectroscopic ellipsometry can be used as a powerful non-destructive tool for analysis of surfaces and multilayer films.

Original languageEnglish (US)
Pages (from-to)317-323
Number of pages7
JournalThin Solid Films
Volume166
Issue numberC
DOIs
StatePublished - Dec 1 1988

Fingerprint

Monochromators
Spectroscopic ellipsometry
Multilayer films
Analog to digital conversion
Computer control
Ellipsometry
Light polarization
Photodetectors
ellipsometry
Multilayers
Polarization
Detectors
polarizers
incidence
signal detectors
ellipsometers
shutters
monochromators
azimuth
light beams

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Variable angle spectroscopic ellipsometry : A non-destructive characterization technique for ultrathin and multilayer materials. / Woollam, John A.; Snyder, Paul G.; Rost, Martin C.

In: Thin Solid Films, Vol. 166, No. C, 01.12.1988, p. 317-323.

Research output: Contribution to journalArticle

@article{6bd0a55e2ce14ba59edc9c77c2ce5e42,
title = "Variable angle spectroscopic ellipsometry: A non-destructive characterization technique for ultrathin and multilayer materials",
abstract = "In the most commonly used form of ellipsometry, a monochromatic collimated linearly polarized light beam is directed at an angle φ{symbol} to the normal of a sample under study. The specularly reflected beam is, in general, elloptically polarized, and the state of polarization is analyzed using a second polarizer and photodetector. A rotating analyzer automated spectroscopic ellipsometer has been constructed in our laboratory. The angle of incidence can be set over a wide range of angles, with a precision and repeatibility of ±0.01°. A computer controls the monochromator, the azimuth of a stepper-motor-driven polarizer, a shutter, and the digitization of the detector signal. There are several other schemes used for acquiring ellipsometric data, and these are discussed in several sources. The purpose of this short review is to show how variable angle of incidence spectroscopic ellipsometry can be used as a powerful non-destructive tool for analysis of surfaces and multilayer films.",
author = "Woollam, {John A.} and Snyder, {Paul G.} and Rost, {Martin C.}",
year = "1988",
month = "12",
day = "1",
doi = "10.1016/0040-6090(88)90393-8",
language = "English (US)",
volume = "166",
pages = "317--323",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",
number = "C",

}

TY - JOUR

T1 - Variable angle spectroscopic ellipsometry

T2 - A non-destructive characterization technique for ultrathin and multilayer materials

AU - Woollam, John A.

AU - Snyder, Paul G.

AU - Rost, Martin C.

PY - 1988/12/1

Y1 - 1988/12/1

N2 - In the most commonly used form of ellipsometry, a monochromatic collimated linearly polarized light beam is directed at an angle φ{symbol} to the normal of a sample under study. The specularly reflected beam is, in general, elloptically polarized, and the state of polarization is analyzed using a second polarizer and photodetector. A rotating analyzer automated spectroscopic ellipsometer has been constructed in our laboratory. The angle of incidence can be set over a wide range of angles, with a precision and repeatibility of ±0.01°. A computer controls the monochromator, the azimuth of a stepper-motor-driven polarizer, a shutter, and the digitization of the detector signal. There are several other schemes used for acquiring ellipsometric data, and these are discussed in several sources. The purpose of this short review is to show how variable angle of incidence spectroscopic ellipsometry can be used as a powerful non-destructive tool for analysis of surfaces and multilayer films.

AB - In the most commonly used form of ellipsometry, a monochromatic collimated linearly polarized light beam is directed at an angle φ{symbol} to the normal of a sample under study. The specularly reflected beam is, in general, elloptically polarized, and the state of polarization is analyzed using a second polarizer and photodetector. A rotating analyzer automated spectroscopic ellipsometer has been constructed in our laboratory. The angle of incidence can be set over a wide range of angles, with a precision and repeatibility of ±0.01°. A computer controls the monochromator, the azimuth of a stepper-motor-driven polarizer, a shutter, and the digitization of the detector signal. There are several other schemes used for acquiring ellipsometric data, and these are discussed in several sources. The purpose of this short review is to show how variable angle of incidence spectroscopic ellipsometry can be used as a powerful non-destructive tool for analysis of surfaces and multilayer films.

UR - http://www.scopus.com/inward/record.url?scp=0024143310&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0024143310&partnerID=8YFLogxK

U2 - 10.1016/0040-6090(88)90393-8

DO - 10.1016/0040-6090(88)90393-8

M3 - Article

AN - SCOPUS:0024143310

VL - 166

SP - 317

EP - 323

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

IS - C

ER -