VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY.

Samuel A. Alterovitz, John A. Woollam, Paul G. Snyder

Research output: Contribution to specialist publicationArticle

44 Citations (Scopus)

Abstract

Null ellipsometry and automated ellipsometry at a single wavelength are established technologies but limited in their range of application. In comparison, spectroscopic ellipsometry at fixed angle and, in the past few years, variable angle spectroscopic ellipsometry (VASE) are powerful analytical tools for the investigation of surfaces, chemical interfaces, semiconductor heterojunctions, quantum well structures, and optoelectronic materials.

Original languageEnglish (US)
Pages99-102
Number of pages4
Volume31
No3
Specialist publicationSolid State Technology
StatePublished - Mar 1 1988

Fingerprint

Spectroscopic ellipsometry
Ellipsometry
ellipsometry
Optoelectronic devices
Semiconductor quantum wells
Heterojunctions
Semiconductor materials
Wavelength
heterojunctions
quantum wells
wavelengths

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Alterovitz, S. A., Woollam, J. A., & Snyder, P. G. (1988). VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY. Solid State Technology, 31(3), 99-102.

VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY. / Alterovitz, Samuel A.; Woollam, John A.; Snyder, Paul G.

In: Solid State Technology, Vol. 31, No. 3, 01.03.1988, p. 99-102.

Research output: Contribution to specialist publicationArticle

Alterovitz, SA, Woollam, JA & Snyder, PG 1988, 'VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY.' Solid State Technology, vol. 31, no. 3, pp. 99-102.
Alterovitz SA, Woollam JA, Snyder PG. VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY. Solid State Technology. 1988 Mar 1;31(3):99-102.
Alterovitz, Samuel A. ; Woollam, John A. ; Snyder, Paul G. / VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY. In: Solid State Technology. 1988 ; Vol. 31, No. 3. pp. 99-102.
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