Variable angle of incidence spectroscopic ellipsometric characterization of TiO2/Ag/TiO2 optical coatings

Kazem Memarzadeh, John A. Woollam, Abe Belkind

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Optical constants (3000-8000 Å) and layer thicknesses of TiO 2/Ag/TiO2 optical coatings are determined using variable angle of incidence spectroscopic ellipsometry. Ellipsometrically determined silver layer thicknesses agree well with those obtained by cross-sectional transmission electron microscopy. Also, spectral characteristics, absent in bulk silver data, are observed in n and k spectra for the thin silver layers. It is suggested that these structures may be caused by plasmon effects from the silver layers.

Original languageEnglish (US)
Pages (from-to)3407-3410
Number of pages4
JournalJournal of Applied Physics
Issue number7
Publication statusPublished - Dec 1 1988


ASJC Scopus subject areas

  • Physics and Astronomy(all)

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