Uncertainty of multiple determination of optical constants and layer thicknesses of thin films case of ti02/ag/ti02 coating on glass

Valery A. Koss, Abraham Belkind, David E. Aspnes, Lawrence Nazar, Jerzy A. Dobrowolski, Fang C. Ho, Kazem Memarzadeh, John A. Woollam, F. Bernoux, Jean P. Piel, Jean Louis Stehle

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Multiply determined thicknesses of constituent layers and optical constants of Ag layer in Tio2/Ag/Ti02 coatings on glass are compared using regions of uncertainties for evaluated parameters. The measurements were done using spectroscopic ellipsometry and spectrophotometry. The regions of uncertainty for each evaluated parameter were obtained using a separately determined accuracy of measurements. It is shown that the actual structure of the coating is more complex than a three or five layer model.

Original languageEnglish (US)
Pages (from-to)199-206
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - Mar 6 1989


ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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