Ultraviolet and visible Raman spectroscopy characterization of chemical vapor deposition diamond films

S. M. Huang, Z. Sun, Y. F. Lu, M. H. Hong

Research output: Contribution to journalArticle

34 Citations (Scopus)

Abstract

Polycrystalline diamond films with different grain sizes (10 nm, 100 nm and 5 μm) were prepared by hot-filament chemical vapor deposition (HFCVD). The diamond films have been studied using ultraviolet (UV, 244 nm), visible (Vis, 514 nm) and (Vis, 633 nm), near-infrared, micro-Raman scattering. The fluorescence in the excited diamond film is found to change considerably with the incident photon energy. The scattering intensity of amorphous sp2-bonded carbon compared to the strength of the 1331 cm-1 Raman line from sp3-bonded diamond is found to vary considerably as functions of the grain size of diamond film and the incident photon energy. Possible models for the structures of amorphous sp2-bonded carbon and sp3-bonded diamond phases are discussed on the basis of the present Raman data. It is shown that UV Raman spectroscopy has provided significantly greater information than visible Raman spectroscopy in characterizing diamond phases.

Original languageEnglish (US)
Pages (from-to)263-267
Number of pages5
JournalSurface and Coatings Technology
Volume151-152
DOIs
StatePublished - Mar 1 2002

Fingerprint

Diamond films
diamond films
Diamond
Raman spectroscopy
Chemical vapor deposition
vapor deposition
Diamonds
diamonds
Carbon
Photons
grain size
carbon
photons
Ultraviolet spectroscopy
Raman scattering
filaments
Fluorescence
Scattering
Raman spectra
Infrared radiation

Keywords

  • Diamond
  • Raman
  • Resonant enhancement
  • Sp bonds
  • Sp bonds

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Ultraviolet and visible Raman spectroscopy characterization of chemical vapor deposition diamond films. / Huang, S. M.; Sun, Z.; Lu, Y. F.; Hong, M. H.

In: Surface and Coatings Technology, Vol. 151-152, 01.03.2002, p. 263-267.

Research output: Contribution to journalArticle

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