Tip-based nanomanufacturing by electrical, chemical, mechanical and thermal processes

A. P. Malshe, Kamlakar P Rajurkar, K. R. Virwani, C. R. Taylor, D. L. Bourell, G. Levy, M. M. Sundaram, J. A. McGeough, V. Kalyanasundaram, A. N. Samant

Research output: Contribution to journalArticle

69 Citations (Scopus)

Abstract

Nanomanufactured products with higher complexities in function, materials, scales and their integration demand an increasing need for advanced manufacturing tools. It is driven by applications such as ultra-dense memory, individualized biomedicine and drug delivery, molecular reading and sorting, and nanoscale circuitry. The tip-based nanomanufacturing (TBN) platform represents a potent gamut of processes for such applications-performing various nanoscale manufacturing operations including machining, depositing, patterning, and assembling with in situ metrology and visualization. This keynote paper presents a comprehensive overview of TBN processes based upon "nanotool tips" applying electrical, electrochemical, mechanical, electromagnetic and other forces to perform manufacturing operations.

Original languageEnglish (US)
Pages (from-to)628-651
Number of pages24
JournalCIRP Annals - Manufacturing Technology
Volume59
Issue number2
DOIs
StatePublished - Jun 25 2010

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Drug delivery
Sorting
Machining
Visualization
Data storage equipment
Hot Temperature

Keywords

  • Manufacturing
  • Nano manufacturing
  • Tip-based nano manufacturing

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

Cite this

Tip-based nanomanufacturing by electrical, chemical, mechanical and thermal processes. / Malshe, A. P.; Rajurkar, Kamlakar P; Virwani, K. R.; Taylor, C. R.; Bourell, D. L.; Levy, G.; Sundaram, M. M.; McGeough, J. A.; Kalyanasundaram, V.; Samant, A. N.

In: CIRP Annals - Manufacturing Technology, Vol. 59, No. 2, 25.06.2010, p. 628-651.

Research output: Contribution to journalArticle

Malshe, AP, Rajurkar, KP, Virwani, KR, Taylor, CR, Bourell, DL, Levy, G, Sundaram, MM, McGeough, JA, Kalyanasundaram, V & Samant, AN 2010, 'Tip-based nanomanufacturing by electrical, chemical, mechanical and thermal processes', CIRP Annals - Manufacturing Technology, vol. 59, no. 2, pp. 628-651. https://doi.org/10.1016/j.cirp.2010.05.006
Malshe, A. P. ; Rajurkar, Kamlakar P ; Virwani, K. R. ; Taylor, C. R. ; Bourell, D. L. ; Levy, G. ; Sundaram, M. M. ; McGeough, J. A. ; Kalyanasundaram, V. ; Samant, A. N. / Tip-based nanomanufacturing by electrical, chemical, mechanical and thermal processes. In: CIRP Annals - Manufacturing Technology. 2010 ; Vol. 59, No. 2. pp. 628-651.
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