Time-resolved plasma emission spectrum analyses at the early stage of laser ablation

M. H. Hong, Y. F. Lu, S. K. Bong

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

Time-resolved plasma emission spectra are analyzed during pulsed laser ablation of solid materials. At early stage for delay time less than 200 ns, individual spectral lines are superimposed on a continuum spectrum, which disappears gradually as delay time increases. Spectral line widths decrease obviously and the peak positions shift to the shorter wavelengths at the same time. Ion spectral lines disappear earlier than the excited atoms due to plasma recombination. Dependence of the emission spectra on laser fluence, probe distance and chamber pressure is also discussed. Spectral line intensities increase with laser fluence and tend to saturate at a high laser fluence due to plasma shielding effect. Most of the spectral line broadening and peak shift take place near the substrate surface. Excited atoms dominate in the plasma inner layer while the outer layer is mostly occupied by the ions at the early stage. Plasma flying speeds are estimated. Spectral line intensity increases with chamber pressure. Electron density as a function of delay time is also studied.

Original languageEnglish (US)
Pages (from-to)196-200
Number of pages5
JournalApplied Surface Science
Volume154
DOIs
StatePublished - Feb 1 2000
Externally publishedYes

Fingerprint

plasma spectra
Laser ablation
laser ablation
line spectra
emission spectra
Plasmas
Time delay
fluence
pressure chambers
time lag
Lasers
spectral line width
Ions
lasers
Atoms
shift
Pulsed lasers
Linewidth
Shielding
Carrier concentration

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

Cite this

Time-resolved plasma emission spectrum analyses at the early stage of laser ablation. / Hong, M. H.; Lu, Y. F.; Bong, S. K.

In: Applied Surface Science, Vol. 154, 01.02.2000, p. 196-200.

Research output: Contribution to journalArticle

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