Time-resolved plasma emission spectrum analyses at the early stage of laser ablation

M. H. Hong, Y. F. Lu, S. K. Bong

Research output: Contribution to journalArticle

19 Scopus citations

Abstract

Time-resolved plasma emission spectra are analyzed during pulsed laser ablation of solid materials. At early stage for delay time less than 200 ns, individual spectral lines are superimposed on a continuum spectrum, which disappears gradually as delay time increases. Spectral line widths decrease obviously and the peak positions shift to the shorter wavelengths at the same time. Ion spectral lines disappear earlier than the excited atoms due to plasma recombination. Dependence of the emission spectra on laser fluence, probe distance and chamber pressure is also discussed. Spectral line intensities increase with laser fluence and tend to saturate at a high laser fluence due to plasma shielding effect. Most of the spectral line broadening and peak shift take place near the substrate surface. Excited atoms dominate in the plasma inner layer while the outer layer is mostly occupied by the ions at the early stage. Plasma flying speeds are estimated. Spectral line intensity increases with chamber pressure. Electron density as a function of delay time is also studied.

Original languageEnglish (US)
Pages (from-to)196-200
Number of pages5
JournalApplied Surface Science
Volume154
DOIs
Publication statusPublished - Feb 1 2000

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ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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