Thz generalized ellipsometry characterization of highly-ordered three-dimensional nanostructures

Tino Hofmann, Daniel Schmidt, Mathias Schubert

Research output: Chapter in Book/Report/Conference proceedingChapter

2 Citations (Scopus)

Abstract

Routine generalized ellipsometry measurements at terahertz (THz) frequencies have become available only very recently, and we present and discuss the application to highly-ordered three-dimensional nanostructure thin films. Such nanostructure thin films are obtained from glancing angle deposition, and consist of slanted columnar structures with high spatial coherence. The slanted columnar thin films reveal strong birefringence due to electronic coupling and screening phenomena. Despite their extreme smallness compared with the THz wavelengThequivalent, slanted columnar nanostructure thin films can be used as sensors for dielectric fluids in transmission or reflection geometries, where measurements can be made through the back side of THz-transparent substrates. We describe an anisotropic biaxial effective medium dielectric function approach which comprises structural, geometrical and constituent fraction information, and which enables quantitative analysis of THz generalized ellipsometry measurements. We further describe a frequencydomain generalized ellipsometer setup which incorporates backward wave oscillator sources.

Original languageEnglish (US)
Title of host publicationEllipsometry at the Nanoscale
PublisherSpringer Berlin Heidelberg
Pages411-428
Number of pages18
ISBN (Electronic)9783642339561
ISBN (Print)9783642339554
DOIs
StatePublished - Jan 1 2013

Fingerprint

Ellipsometry
Nanostructures
Thin films
Birefringence
Screening
Fluids
Geometry
Sensors
Substrates
Chemical analysis

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Hofmann, T., Schmidt, D., & Schubert, M. (2013). Thz generalized ellipsometry characterization of highly-ordered three-dimensional nanostructures. In Ellipsometry at the Nanoscale (pp. 411-428). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-642-33956-1

Thz generalized ellipsometry characterization of highly-ordered three-dimensional nanostructures. / Hofmann, Tino; Schmidt, Daniel; Schubert, Mathias.

Ellipsometry at the Nanoscale. Springer Berlin Heidelberg, 2013. p. 411-428.

Research output: Chapter in Book/Report/Conference proceedingChapter

Hofmann, T, Schmidt, D & Schubert, M 2013, Thz generalized ellipsometry characterization of highly-ordered three-dimensional nanostructures. in Ellipsometry at the Nanoscale. Springer Berlin Heidelberg, pp. 411-428. https://doi.org/10.1007/978-3-642-33956-1
Hofmann T, Schmidt D, Schubert M. Thz generalized ellipsometry characterization of highly-ordered three-dimensional nanostructures. In Ellipsometry at the Nanoscale. Springer Berlin Heidelberg. 2013. p. 411-428 https://doi.org/10.1007/978-3-642-33956-1
Hofmann, Tino ; Schmidt, Daniel ; Schubert, Mathias. / Thz generalized ellipsometry characterization of highly-ordered three-dimensional nanostructures. Ellipsometry at the Nanoscale. Springer Berlin Heidelberg, 2013. pp. 411-428
@inbook{1ee92920cced4b2b8bcc85f6afe38552,
title = "Thz generalized ellipsometry characterization of highly-ordered three-dimensional nanostructures",
abstract = "Routine generalized ellipsometry measurements at terahertz (THz) frequencies have become available only very recently, and we present and discuss the application to highly-ordered three-dimensional nanostructure thin films. Such nanostructure thin films are obtained from glancing angle deposition, and consist of slanted columnar structures with high spatial coherence. The slanted columnar thin films reveal strong birefringence due to electronic coupling and screening phenomena. Despite their extreme smallness compared with the THz wavelengThequivalent, slanted columnar nanostructure thin films can be used as sensors for dielectric fluids in transmission or reflection geometries, where measurements can be made through the back side of THz-transparent substrates. We describe an anisotropic biaxial effective medium dielectric function approach which comprises structural, geometrical and constituent fraction information, and which enables quantitative analysis of THz generalized ellipsometry measurements. We further describe a frequencydomain generalized ellipsometer setup which incorporates backward wave oscillator sources.",
author = "Tino Hofmann and Daniel Schmidt and Mathias Schubert",
year = "2013",
month = "1",
day = "1",
doi = "10.1007/978-3-642-33956-1",
language = "English (US)",
isbn = "9783642339554",
pages = "411--428",
booktitle = "Ellipsometry at the Nanoscale",
publisher = "Springer Berlin Heidelberg",

}

TY - CHAP

T1 - Thz generalized ellipsometry characterization of highly-ordered three-dimensional nanostructures

AU - Hofmann, Tino

AU - Schmidt, Daniel

AU - Schubert, Mathias

PY - 2013/1/1

Y1 - 2013/1/1

N2 - Routine generalized ellipsometry measurements at terahertz (THz) frequencies have become available only very recently, and we present and discuss the application to highly-ordered three-dimensional nanostructure thin films. Such nanostructure thin films are obtained from glancing angle deposition, and consist of slanted columnar structures with high spatial coherence. The slanted columnar thin films reveal strong birefringence due to electronic coupling and screening phenomena. Despite their extreme smallness compared with the THz wavelengThequivalent, slanted columnar nanostructure thin films can be used as sensors for dielectric fluids in transmission or reflection geometries, where measurements can be made through the back side of THz-transparent substrates. We describe an anisotropic biaxial effective medium dielectric function approach which comprises structural, geometrical and constituent fraction information, and which enables quantitative analysis of THz generalized ellipsometry measurements. We further describe a frequencydomain generalized ellipsometer setup which incorporates backward wave oscillator sources.

AB - Routine generalized ellipsometry measurements at terahertz (THz) frequencies have become available only very recently, and we present and discuss the application to highly-ordered three-dimensional nanostructure thin films. Such nanostructure thin films are obtained from glancing angle deposition, and consist of slanted columnar structures with high spatial coherence. The slanted columnar thin films reveal strong birefringence due to electronic coupling and screening phenomena. Despite their extreme smallness compared with the THz wavelengThequivalent, slanted columnar nanostructure thin films can be used as sensors for dielectric fluids in transmission or reflection geometries, where measurements can be made through the back side of THz-transparent substrates. We describe an anisotropic biaxial effective medium dielectric function approach which comprises structural, geometrical and constituent fraction information, and which enables quantitative analysis of THz generalized ellipsometry measurements. We further describe a frequencydomain generalized ellipsometer setup which incorporates backward wave oscillator sources.

UR - http://www.scopus.com/inward/record.url?scp=84948146251&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84948146251&partnerID=8YFLogxK

U2 - 10.1007/978-3-642-33956-1

DO - 10.1007/978-3-642-33956-1

M3 - Chapter

AN - SCOPUS:84948146251

SN - 9783642339554

SP - 411

EP - 428

BT - Ellipsometry at the Nanoscale

PB - Springer Berlin Heidelberg

ER -