Thin-film hermeticity

A quantitative analysis of diamondlike carbon using variable angle spectroscopic ellipsometry

S. Orzeszko, Bhola N. De, John A Woollam, John J. Pouch, Samuel A. Alterovitz, David C. Ingram

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

The purpose of this paper is twofold. First, we report on the successful application of variable angle spectroscopic ellipsometry to quantitative thin-film hermeticity evaluation. Secondly, it is shown that under a variety of film preparations and moisture introduction conditions water penetrates only a very thin diamondlike carbon (DLC) top surface-roughness region. Thus DLC is an excellent candidate for use as protective coatings in adverse chemical and aqueous environments.

Original languageEnglish (US)
Pages (from-to)4175-4180
Number of pages6
JournalJournal of Applied Physics
Volume64
Issue number8
DOIs
StatePublished - Dec 1 1988

Fingerprint

quantitative analysis
ellipsometry
protective coatings
carbon
thin films
moisture
surface roughness
preparation
evaluation
water

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Thin-film hermeticity : A quantitative analysis of diamondlike carbon using variable angle spectroscopic ellipsometry. / Orzeszko, S.; De, Bhola N.; Woollam, John A; Pouch, John J.; Alterovitz, Samuel A.; Ingram, David C.

In: Journal of Applied Physics, Vol. 64, No. 8, 01.12.1988, p. 4175-4180.

Research output: Contribution to journalArticle

Orzeszko, S. ; De, Bhola N. ; Woollam, John A ; Pouch, John J. ; Alterovitz, Samuel A. ; Ingram, David C. / Thin-film hermeticity : A quantitative analysis of diamondlike carbon using variable angle spectroscopic ellipsometry. In: Journal of Applied Physics. 1988 ; Vol. 64, No. 8. pp. 4175-4180.
@article{2789286fad9c446c94714ff0975b015c,
title = "Thin-film hermeticity: A quantitative analysis of diamondlike carbon using variable angle spectroscopic ellipsometry",
abstract = "The purpose of this paper is twofold. First, we report on the successful application of variable angle spectroscopic ellipsometry to quantitative thin-film hermeticity evaluation. Secondly, it is shown that under a variety of film preparations and moisture introduction conditions water penetrates only a very thin diamondlike carbon (DLC) top surface-roughness region. Thus DLC is an excellent candidate for use as protective coatings in adverse chemical and aqueous environments.",
author = "S. Orzeszko and De, {Bhola N.} and Woollam, {John A} and Pouch, {John J.} and Alterovitz, {Samuel A.} and Ingram, {David C.}",
year = "1988",
month = "12",
day = "1",
doi = "10.1063/1.341331",
language = "English (US)",
volume = "64",
pages = "4175--4180",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "8",

}

TY - JOUR

T1 - Thin-film hermeticity

T2 - A quantitative analysis of diamondlike carbon using variable angle spectroscopic ellipsometry

AU - Orzeszko, S.

AU - De, Bhola N.

AU - Woollam, John A

AU - Pouch, John J.

AU - Alterovitz, Samuel A.

AU - Ingram, David C.

PY - 1988/12/1

Y1 - 1988/12/1

N2 - The purpose of this paper is twofold. First, we report on the successful application of variable angle spectroscopic ellipsometry to quantitative thin-film hermeticity evaluation. Secondly, it is shown that under a variety of film preparations and moisture introduction conditions water penetrates only a very thin diamondlike carbon (DLC) top surface-roughness region. Thus DLC is an excellent candidate for use as protective coatings in adverse chemical and aqueous environments.

AB - The purpose of this paper is twofold. First, we report on the successful application of variable angle spectroscopic ellipsometry to quantitative thin-film hermeticity evaluation. Secondly, it is shown that under a variety of film preparations and moisture introduction conditions water penetrates only a very thin diamondlike carbon (DLC) top surface-roughness region. Thus DLC is an excellent candidate for use as protective coatings in adverse chemical and aqueous environments.

UR - http://www.scopus.com/inward/record.url?scp=0042360687&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0042360687&partnerID=8YFLogxK

U2 - 10.1063/1.341331

DO - 10.1063/1.341331

M3 - Article

VL - 64

SP - 4175

EP - 4180

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 8

ER -