Theory and Application of Generalized Ellipsometry

Research output: Chapter in Book/Report/Conference proceedingChapter

23 Citations (Scopus)
Original languageEnglish (US)
Title of host publicationHandbook of Ellipsometry
PublisherElsevier Inc.
Pages637-717
Number of pages81
ISBN (Electronic)9780815517474
ISBN (Print)9780815514992
DOIs
StatePublished - Dec 31 2005

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Ellipsometry

ASJC Scopus subject areas

  • Engineering(all)
  • Chemical Engineering(all)

Cite this

Theory and Application of Generalized Ellipsometry. / Schubert, Mathias.

Handbook of Ellipsometry. Elsevier Inc., 2005. p. 637-717.

Research output: Chapter in Book/Report/Conference proceedingChapter

Schubert, Mathias. / Theory and Application of Generalized Ellipsometry. Handbook of Ellipsometry. Elsevier Inc., 2005. pp. 637-717
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