The effects of thermal annealing on ZnO thin films grown by pulsed laser deposition

Y. F. Lu, H. Q. Ni, Z. H. Mai, Z. M. Ren

Research output: Contribution to journalArticle

158 Citations (Scopus)

Abstract

ZnO thin films were grown on silicon (100) by pulsed laser deposition. Highly textured crystalline ZnO thin films can be grown at 600°C. The films were then annealed at 600°C in oxygen. The effects of annealing on chemical composition of the ZnO films were investigated by x-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. The XPS spectra indicate that water has been adsorbed and then dissociated into H and OH groups. The surface properties of ZnO were studied both by scanning tunneling microscopy and scanning tunneling spectroscopy (STS). A narrow potential well has been formed on the surface of the ZnO thin films due to high density of surface states and negatively biasing the ZnO thin films during STS measurement. The discrete energy levels can be measured by STS.

Original languageEnglish (US)
Pages (from-to)498-502
Number of pages5
JournalJournal of Applied Physics
Volume88
Issue number1
DOIs
StatePublished - Jul 2000

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pulsed laser deposition
annealing
thin films
x ray spectroscopy
scanning
photoelectron spectroscopy
spectroscopy
surface properties
scanning tunneling microscopy
chemical composition
Raman spectroscopy
energy levels
silicon
oxygen
water

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

The effects of thermal annealing on ZnO thin films grown by pulsed laser deposition. / Lu, Y. F.; Ni, H. Q.; Mai, Z. H.; Ren, Z. M.

In: Journal of Applied Physics, Vol. 88, No. 1, 07.2000, p. 498-502.

Research output: Contribution to journalArticle

Lu, Y. F. ; Ni, H. Q. ; Mai, Z. H. ; Ren, Z. M. / The effects of thermal annealing on ZnO thin films grown by pulsed laser deposition. In: Journal of Applied Physics. 2000 ; Vol. 88, No. 1. pp. 498-502.
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