Temperature dependence of nanopatterning of inhomogeneously strained surfaces

M. I. Larsson, B. M. Clemens, R. F. Sabiryanov, Kyeongjae Cho

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The temperature and deposition rate dependence of nanopattern formation on inhomogeneously strained surfaces is investigated by means of kinetic Monte Carlo simulations. This study proposes that technologically achievable strain fields (that often are less than 1%) can be used to produce high-quality nanopatterns. We predict that ordered nanopatterns can be achieved even for small surface strain-field modulations if the temperature and deposition rate are large enough. To observe this effect, the mean adatom surface diffusion length has to be more or less equal to the period of the strain field. On the other hand, for larger strain-field modulations good nanopatterning can be achieved for a wide range of growth rates, especially at low temperatures.

Original languageEnglish (US)
Title of host publication2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - Proceedings
PublisherIEEE Computer Society
Pages267-270
Number of pages4
ISBN (Electronic)0780379764
DOIs
StatePublished - Jan 1 2003
Event2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - San Francisco, United States
Duration: Aug 12 2003Aug 14 2003

Publication series

NameProceedings of the IEEE Conference on Nanotechnology
Volume1
ISSN (Print)1944-9399
ISSN (Electronic)1944-9380

Other

Other2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003
CountryUnited States
CitySan Francisco
Period8/12/038/14/03

Fingerprint

temperature dependence
Deposition rates
modulation
Modulation
surface diffusion
diffusion length
Temperature
adatoms
Adatoms
Surface diffusion
temperature
kinetics
Kinetics
simulation
Monte Carlo simulation

Keywords

  • Capacitive sensors
  • Kinetic theory
  • Lattices
  • Materials science and technology
  • Mechanical engineering
  • Nanopatterning
  • Physics
  • Predictive models
  • Temperature dependence
  • Temperature distribution

ASJC Scopus subject areas

  • Bioengineering
  • Electrical and Electronic Engineering
  • Materials Chemistry
  • Condensed Matter Physics

Cite this

Larsson, M. I., Clemens, B. M., Sabiryanov, R. F., & Cho, K. (2003). Temperature dependence of nanopatterning of inhomogeneously strained surfaces. In 2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - Proceedings (pp. 267-270). [1231768] (Proceedings of the IEEE Conference on Nanotechnology; Vol. 1). IEEE Computer Society. https://doi.org/10.1109/NANO.2003.1231768

Temperature dependence of nanopatterning of inhomogeneously strained surfaces. / Larsson, M. I.; Clemens, B. M.; Sabiryanov, R. F.; Cho, Kyeongjae.

2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - Proceedings. IEEE Computer Society, 2003. p. 267-270 1231768 (Proceedings of the IEEE Conference on Nanotechnology; Vol. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Larsson, MI, Clemens, BM, Sabiryanov, RF & Cho, K 2003, Temperature dependence of nanopatterning of inhomogeneously strained surfaces. in 2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - Proceedings., 1231768, Proceedings of the IEEE Conference on Nanotechnology, vol. 1, IEEE Computer Society, pp. 267-270, 2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003, San Francisco, United States, 8/12/03. https://doi.org/10.1109/NANO.2003.1231768
Larsson MI, Clemens BM, Sabiryanov RF, Cho K. Temperature dependence of nanopatterning of inhomogeneously strained surfaces. In 2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - Proceedings. IEEE Computer Society. 2003. p. 267-270. 1231768. (Proceedings of the IEEE Conference on Nanotechnology). https://doi.org/10.1109/NANO.2003.1231768
Larsson, M. I. ; Clemens, B. M. ; Sabiryanov, R. F. ; Cho, Kyeongjae. / Temperature dependence of nanopatterning of inhomogeneously strained surfaces. 2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - Proceedings. IEEE Computer Society, 2003. pp. 267-270 (Proceedings of the IEEE Conference on Nanotechnology).
@inproceedings{a04368eb381d48ac9d781b2723385098,
title = "Temperature dependence of nanopatterning of inhomogeneously strained surfaces",
abstract = "The temperature and deposition rate dependence of nanopattern formation on inhomogeneously strained surfaces is investigated by means of kinetic Monte Carlo simulations. This study proposes that technologically achievable strain fields (that often are less than 1{\%}) can be used to produce high-quality nanopatterns. We predict that ordered nanopatterns can be achieved even for small surface strain-field modulations if the temperature and deposition rate are large enough. To observe this effect, the mean adatom surface diffusion length has to be more or less equal to the period of the strain field. On the other hand, for larger strain-field modulations good nanopatterning can be achieved for a wide range of growth rates, especially at low temperatures.",
keywords = "Capacitive sensors, Kinetic theory, Lattices, Materials science and technology, Mechanical engineering, Nanopatterning, Physics, Predictive models, Temperature dependence, Temperature distribution",
author = "Larsson, {M. I.} and Clemens, {B. M.} and Sabiryanov, {R. F.} and Kyeongjae Cho",
year = "2003",
month = "1",
day = "1",
doi = "10.1109/NANO.2003.1231768",
language = "English (US)",
series = "Proceedings of the IEEE Conference on Nanotechnology",
publisher = "IEEE Computer Society",
pages = "267--270",
booktitle = "2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - Proceedings",

}

TY - GEN

T1 - Temperature dependence of nanopatterning of inhomogeneously strained surfaces

AU - Larsson, M. I.

AU - Clemens, B. M.

AU - Sabiryanov, R. F.

AU - Cho, Kyeongjae

PY - 2003/1/1

Y1 - 2003/1/1

N2 - The temperature and deposition rate dependence of nanopattern formation on inhomogeneously strained surfaces is investigated by means of kinetic Monte Carlo simulations. This study proposes that technologically achievable strain fields (that often are less than 1%) can be used to produce high-quality nanopatterns. We predict that ordered nanopatterns can be achieved even for small surface strain-field modulations if the temperature and deposition rate are large enough. To observe this effect, the mean adatom surface diffusion length has to be more or less equal to the period of the strain field. On the other hand, for larger strain-field modulations good nanopatterning can be achieved for a wide range of growth rates, especially at low temperatures.

AB - The temperature and deposition rate dependence of nanopattern formation on inhomogeneously strained surfaces is investigated by means of kinetic Monte Carlo simulations. This study proposes that technologically achievable strain fields (that often are less than 1%) can be used to produce high-quality nanopatterns. We predict that ordered nanopatterns can be achieved even for small surface strain-field modulations if the temperature and deposition rate are large enough. To observe this effect, the mean adatom surface diffusion length has to be more or less equal to the period of the strain field. On the other hand, for larger strain-field modulations good nanopatterning can be achieved for a wide range of growth rates, especially at low temperatures.

KW - Capacitive sensors

KW - Kinetic theory

KW - Lattices

KW - Materials science and technology

KW - Mechanical engineering

KW - Nanopatterning

KW - Physics

KW - Predictive models

KW - Temperature dependence

KW - Temperature distribution

UR - http://www.scopus.com/inward/record.url?scp=84943251798&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84943251798&partnerID=8YFLogxK

U2 - 10.1109/NANO.2003.1231768

DO - 10.1109/NANO.2003.1231768

M3 - Conference contribution

AN - SCOPUS:84943251798

T3 - Proceedings of the IEEE Conference on Nanotechnology

SP - 267

EP - 270

BT - 2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - Proceedings

PB - IEEE Computer Society

ER -