SYSTEMATICS OF SILICIDE FORMATION BY HIGH DOSE IMPLANTATION OF TRANSITION METALS INTO Si.

Fereydoon Namavar, F. H. Sanchez, J. I. Budnick, A. H. Fasihuddin, H. C. Hayden

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)

Abstract

Authors have studied the formation of transition-metal thin films by high dose (up to 10**1**8 ions/cm**2) implantation of Ti, V, Cr, Mn, Fe, Co, Ni and Nb at room temperature and 350 degree C into Si less than 100 greater than . For implantation at 350 degree C, our results, as obtained by Rutherford backscattering, X-ray diffractometry and Read Camera measurements, indicate that one can categorize these metals into two groups: 1. a chromium group which includes V, Cr, Nb, Ti and Mn. Metals V, Cr and Nb form compounds (VSi//2, CrSi//2, NbSi//2) with a hexagonal structure of the CrSi//2 type whereas Ti and Mn both form compounds (Ti//5Si//3, Mn//5Si//3) with a hexagonal structure of the Mn//5Si//3 type. 2. an iron group which includes Fe, Co and Ni. These metals form compounds (FeSi, CoSi, NiSi) with a cubic structure of the FeSi type. In this paper the experimental results for Cr and Fe implantation at room temperature and 350 degree C will be discussed.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposia Proceedings
EditorsMichael O. Thompson, S.Thomas Picraux, James S. Williams
PublisherMaterials Research Soc
Pages487-492
Number of pages6
ISBN (Print)0931837405
StatePublished - Dec 1 1987
EventBeam-Solid Interact and Transient Processes - Boston, MA, USA
Duration: Dec 1 1986Dec 4 1986

Publication series

NameMaterials Research Society Symposia Proceedings
Volume74
ISSN (Print)0272-9172

Other

OtherBeam-Solid Interact and Transient Processes
CityBoston, MA, USA
Period12/1/8612/4/86

Fingerprint

Transition metals
Metals
Rutherford backscattering spectroscopy
Chromium
Ion implantation
X ray diffraction analysis
Iron
Cameras
Ions
Thin films
Temperature

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Namavar, F., Sanchez, F. H., Budnick, J. I., Fasihuddin, A. H., & Hayden, H. C. (1987). SYSTEMATICS OF SILICIDE FORMATION BY HIGH DOSE IMPLANTATION OF TRANSITION METALS INTO Si. In M. O. Thompson, S. T. Picraux, & J. S. Williams (Eds.), Materials Research Society Symposia Proceedings (pp. 487-492). (Materials Research Society Symposia Proceedings; Vol. 74). Materials Research Soc.

SYSTEMATICS OF SILICIDE FORMATION BY HIGH DOSE IMPLANTATION OF TRANSITION METALS INTO Si. / Namavar, Fereydoon; Sanchez, F. H.; Budnick, J. I.; Fasihuddin, A. H.; Hayden, H. C.

Materials Research Society Symposia Proceedings. ed. / Michael O. Thompson; S.Thomas Picraux; James S. Williams. Materials Research Soc, 1987. p. 487-492 (Materials Research Society Symposia Proceedings; Vol. 74).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Namavar, F, Sanchez, FH, Budnick, JI, Fasihuddin, AH & Hayden, HC 1987, SYSTEMATICS OF SILICIDE FORMATION BY HIGH DOSE IMPLANTATION OF TRANSITION METALS INTO Si. in MO Thompson, ST Picraux & JS Williams (eds), Materials Research Society Symposia Proceedings. Materials Research Society Symposia Proceedings, vol. 74, Materials Research Soc, pp. 487-492, Beam-Solid Interact and Transient Processes, Boston, MA, USA, 12/1/86.
Namavar F, Sanchez FH, Budnick JI, Fasihuddin AH, Hayden HC. SYSTEMATICS OF SILICIDE FORMATION BY HIGH DOSE IMPLANTATION OF TRANSITION METALS INTO Si. In Thompson MO, Picraux ST, Williams JS, editors, Materials Research Society Symposia Proceedings. Materials Research Soc. 1987. p. 487-492. (Materials Research Society Symposia Proceedings).
Namavar, Fereydoon ; Sanchez, F. H. ; Budnick, J. I. ; Fasihuddin, A. H. ; Hayden, H. C. / SYSTEMATICS OF SILICIDE FORMATION BY HIGH DOSE IMPLANTATION OF TRANSITION METALS INTO Si. Materials Research Society Symposia Proceedings. editor / Michael O. Thompson ; S.Thomas Picraux ; James S. Williams. Materials Research Soc, 1987. pp. 487-492 (Materials Research Society Symposia Proceedings).
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