Synthesis of suspended carbon nanotubes on silicon inverse-opal structures by laser-assisted chemical vapour deposition

J. Shi, Yongfeng Lu, H. Wang, K. J. Yi, Y. S. Lin, R. Zhang, Sy-Hwang Liou

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Suspended single-walled carbon nanotubes (SWNTs) have been synthesized on Si inverse-opal structures by laser-assisted chemical vapour deposition (LCVD). A CW CO2 laser at 10.6νm was used to directly irradiate the substrates during the LCVD process. At a laser power density of 14.3MWm -2, suspended SWNT networks were found predominantly rooted at the sharp edges in the Si inverse-opal structures. Raman spectroscopy indicated that the SWNT networks were composed of high-quality defect-free SWNTs with an average diameter of 1.3nm. At a lower laser power density (6.4MWm-2), multi-walled carbon nanotubes (MWNTs) were grown on the entire surface of the substrates. The preference for the synthesis of SWNTs or MWNTs was attributed to the difference in the catalyst sizes as well as the growth temperature in the LCVD process.

Original languageEnglish (US)
Article number036
Pages (from-to)3822-3826
Number of pages5
JournalNanotechnology
Volume17
Issue number15
DOIs
StatePublished - Aug 14 2006

Fingerprint

Carbon Nanotubes
Silicon
Single-walled carbon nanotubes (SWCN)
Chemical vapor deposition
Carbon nanotubes
carbon nanotubes
vapor deposition
Lasers
silicon
synthesis
lasers
radiant flux density
Continuous wave lasers
Growth temperature
Substrates
Raman spectroscopy
Defects
Catalysts
catalysts
defects

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Synthesis of suspended carbon nanotubes on silicon inverse-opal structures by laser-assisted chemical vapour deposition. / Shi, J.; Lu, Yongfeng; Wang, H.; Yi, K. J.; Lin, Y. S.; Zhang, R.; Liou, Sy-Hwang.

In: Nanotechnology, Vol. 17, No. 15, 036, 14.08.2006, p. 3822-3826.

Research output: Contribution to journalArticle

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