Synthesis of graphene pattern using laser-induced chemical vapor deposition

Jongbok Park, Swook Hann, Yongfeng Lu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this study, Graphene patterns using laser-induced chemical vapor deposition (LCVD) with a visible CW laser (λ = 532 nm) irradiation at room temperature was investigated. Optically-pumped solid-state laser with a wavelength of 532 nm irradiates a thin nickel foil to induce a local temperature rise, thereby allowing the direct writing of graphene patterns about ∼10 μm in width with high growth rate on precisely controlled positions. It is demonstrate that the fabrication of graphene patterns can be achieved with a single scan for each graphene pattern using LCVD with no annealing or preprocessing of the substrate. The scan speed reaches to about ∼200 μm/s, which indicates that the graphene pattern with an unite area (10×10 μm) can be grown in 0.05 sec. The number of graphene layers was controlled by laser scan speed on a substrate. The fabricated graphene patterns on nickel foils were directly transferred to desired positions on patterned electrodes. The position-controlled transfer with rapid single-step fabrication of graphene patterns provides an innovative pathway for application of electrical circuits and devices.

Original languageEnglish (US)
Title of host publicationLaser-Based Micro- and Nanoprocessing VIII
PublisherSPIE
ISBN (Print)9780819498816
DOIs
StatePublished - Jan 1 2014
EventLaser-Based Micro- and Nanoprocessing VIII - San Francisco, CA, United States
Duration: Feb 4 2014Feb 6 2014

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8968
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceLaser-Based Micro- and Nanoprocessing VIII
CountryUnited States
CitySan Francisco, CA
Period2/4/142/6/14

Fingerprint

Graphite
Chemical Vapor Deposition
Graphene
Chemical vapor deposition
graphene
vapor deposition
Synthesis
Laser
Lasers
synthesis
lasers
Nickel
Metal foil
foils
Fabrication
Substrate
nickel
Electrical Circuits
fabrication
Solid-state Laser

Keywords

  • Graphene
  • Graphene pattern
  • Laser-induced chemical vapor deposition

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Park, J., Hann, S., & Lu, Y. (2014). Synthesis of graphene pattern using laser-induced chemical vapor deposition. In Laser-Based Micro- and Nanoprocessing VIII [896813] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8968). SPIE. https://doi.org/10.1117/12.2038059

Synthesis of graphene pattern using laser-induced chemical vapor deposition. / Park, Jongbok; Hann, Swook; Lu, Yongfeng.

Laser-Based Micro- and Nanoprocessing VIII. SPIE, 2014. 896813 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8968).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Park, J, Hann, S & Lu, Y 2014, Synthesis of graphene pattern using laser-induced chemical vapor deposition. in Laser-Based Micro- and Nanoprocessing VIII., 896813, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8968, SPIE, Laser-Based Micro- and Nanoprocessing VIII, San Francisco, CA, United States, 2/4/14. https://doi.org/10.1117/12.2038059
Park J, Hann S, Lu Y. Synthesis of graphene pattern using laser-induced chemical vapor deposition. In Laser-Based Micro- and Nanoprocessing VIII. SPIE. 2014. 896813. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.2038059
Park, Jongbok ; Hann, Swook ; Lu, Yongfeng. / Synthesis of graphene pattern using laser-induced chemical vapor deposition. Laser-Based Micro- and Nanoprocessing VIII. SPIE, 2014. (Proceedings of SPIE - The International Society for Optical Engineering).
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