Synthesis of BCN thin films by nitrogen ion beam assisted pulsed laser deposition from a B4C target

Z. F. Ying, D. Yu, H. Ling, N. Xu, Yongfeng Lu, J. Sun, J. D. Wu

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

Using sintered B4C as target material, ternary BCN thin films were synthesized on Si(100) substrates by means of reactive pulsed laser deposition assisted by nitrogen ion beam. The composition, bonding configuration and crystalline structure of the synthesized films were characterized by X-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy and transmission electron microscopy. The prepared films contain several bonds including B-C, N-C, B-N with B-C-N atomic hybridization. The ablation of the B4C target results in the deposition of a film with B:C ratio about 3:1, deficient in boron compared with the target material. Nitrogen provided by the ion beam is incorporated in the film and bonded to boron and carbon. Heating of the substrate enhances the incorporation of nitrogen and influences the bonding configuration and crystalline structure of the film as well.

Original languageEnglish (US)
Pages (from-to)1579-1585
Number of pages7
JournalDiamond and Related Materials
Volume16
Issue number8
DOIs
StatePublished - Aug 1 2007

Fingerprint

Ion beam assisted deposition
nitrogen ions
Pulsed laser deposition
pulsed laser deposition
Nitrogen
ion beams
Thin films
synthesis
thin films
Boron
Ion beams
boron
Crystalline materials
nitrogen
Infrared transmission
Substrates
Ablation
configurations
ablation
Fourier transform infrared spectroscopy

Keywords

  • Boron carbon nitride thin film
  • Ion beam assisted deposition
  • Kaufman ion gun
  • Nitrogen ion beam
  • Reactive pulsed laser deposition

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

Cite this

Synthesis of BCN thin films by nitrogen ion beam assisted pulsed laser deposition from a B4C target. / Ying, Z. F.; Yu, D.; Ling, H.; Xu, N.; Lu, Yongfeng; Sun, J.; Wu, J. D.

In: Diamond and Related Materials, Vol. 16, No. 8, 01.08.2007, p. 1579-1585.

Research output: Contribution to journalArticle

Ying, Z. F. ; Yu, D. ; Ling, H. ; Xu, N. ; Lu, Yongfeng ; Sun, J. ; Wu, J. D. / Synthesis of BCN thin films by nitrogen ion beam assisted pulsed laser deposition from a B4C target. In: Diamond and Related Materials. 2007 ; Vol. 16, No. 8. pp. 1579-1585.
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AU - Sun, J.

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