Surface damage in a Mn-Zn ferrite induced by laser chemical etching

Yong Feng Lu, Mikio Takai

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Surface damage induced by laser etching of a Mn-Zn ferrite has been investigated by Rutherford backscattering spectrometry and proton-induced x-ray emission measurements. It is found that laser-induced etching of the Mn-Zn ferrite in both CCl4 gas and H3PO4 could cause surface damage that is much less than that induced by mechanical polishing. The laser-induced surface damage is distributed in a thin surface layer with a thickness of 50 nm. It is also found that the surface damage is caused by thermally activated lattice dislocation and impurity doping due to the laser irradiation instead of the chemical reactions between etchant chemicals and the ferrite surface. There are two different sources of damage: one is the interstitial atoms from the ferrite substrates; another is from interstitial impurity atoms resulting from the etching process. The study also indicates that the surface damage could reduce the magnetization of the substrate surface.

Original languageEnglish (US)
Pages (from-to)158-162
Number of pages5
JournalJournal of Applied Physics
Volume73
Issue number1
DOIs
StatePublished - Dec 1 1993

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chemical lasers
ferrites
etching
damage
lasers
interstitials
impurities
etchants
polishing
atoms
chemical reactions
backscattering
surface layers
magnetization
irradiation
protons
causes
gases
spectroscopy

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Surface damage in a Mn-Zn ferrite induced by laser chemical etching. / Lu, Yong Feng; Takai, Mikio.

In: Journal of Applied Physics, Vol. 73, No. 1, 01.12.1993, p. 158-162.

Research output: Contribution to journalArticle

@article{e4273bf7399341b79541462f61cff346,
title = "Surface damage in a Mn-Zn ferrite induced by laser chemical etching",
abstract = "Surface damage induced by laser etching of a Mn-Zn ferrite has been investigated by Rutherford backscattering spectrometry and proton-induced x-ray emission measurements. It is found that laser-induced etching of the Mn-Zn ferrite in both CCl4 gas and H3PO4 could cause surface damage that is much less than that induced by mechanical polishing. The laser-induced surface damage is distributed in a thin surface layer with a thickness of 50 nm. It is also found that the surface damage is caused by thermally activated lattice dislocation and impurity doping due to the laser irradiation instead of the chemical reactions between etchant chemicals and the ferrite surface. There are two different sources of damage: one is the interstitial atoms from the ferrite substrates; another is from interstitial impurity atoms resulting from the etching process. The study also indicates that the surface damage could reduce the magnetization of the substrate surface.",
author = "Lu, {Yong Feng} and Mikio Takai",
year = "1993",
month = "12",
day = "1",
doi = "10.1063/1.353877",
language = "English (US)",
volume = "73",
pages = "158--162",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "1",

}

TY - JOUR

T1 - Surface damage in a Mn-Zn ferrite induced by laser chemical etching

AU - Lu, Yong Feng

AU - Takai, Mikio

PY - 1993/12/1

Y1 - 1993/12/1

N2 - Surface damage induced by laser etching of a Mn-Zn ferrite has been investigated by Rutherford backscattering spectrometry and proton-induced x-ray emission measurements. It is found that laser-induced etching of the Mn-Zn ferrite in both CCl4 gas and H3PO4 could cause surface damage that is much less than that induced by mechanical polishing. The laser-induced surface damage is distributed in a thin surface layer with a thickness of 50 nm. It is also found that the surface damage is caused by thermally activated lattice dislocation and impurity doping due to the laser irradiation instead of the chemical reactions between etchant chemicals and the ferrite surface. There are two different sources of damage: one is the interstitial atoms from the ferrite substrates; another is from interstitial impurity atoms resulting from the etching process. The study also indicates that the surface damage could reduce the magnetization of the substrate surface.

AB - Surface damage induced by laser etching of a Mn-Zn ferrite has been investigated by Rutherford backscattering spectrometry and proton-induced x-ray emission measurements. It is found that laser-induced etching of the Mn-Zn ferrite in both CCl4 gas and H3PO4 could cause surface damage that is much less than that induced by mechanical polishing. The laser-induced surface damage is distributed in a thin surface layer with a thickness of 50 nm. It is also found that the surface damage is caused by thermally activated lattice dislocation and impurity doping due to the laser irradiation instead of the chemical reactions between etchant chemicals and the ferrite surface. There are two different sources of damage: one is the interstitial atoms from the ferrite substrates; another is from interstitial impurity atoms resulting from the etching process. The study also indicates that the surface damage could reduce the magnetization of the substrate surface.

UR - http://www.scopus.com/inward/record.url?scp=36449005740&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=36449005740&partnerID=8YFLogxK

U2 - 10.1063/1.353877

DO - 10.1063/1.353877

M3 - Article

AN - SCOPUS:36449005740

VL - 73

SP - 158

EP - 162

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 1

ER -