Surface cleaning of metals by pulsed-laser irradiation in air

Y. F. Lu, M. Takai, S. Komuro, T. Shiokawa, Y. Aoyagi

Research output: Contribution to journalArticle

62 Citations (Scopus)

Abstract

The surface-cleaning effect of metals was investigated using KrF-excimer-laser irradiation of metal surfaces in air. The laser-induced cleaning of copper, stainless steel and aluminum surfaces was studied. It is found that laser cleaning is an effective cleaning process for metals even if the metal surfaces are heavily contaminated. It is also found that short wavelength and pulse duration are necessary for laser surface-cleaning. The energy density of the laser pulse is an important parameter in the cleaning process. Low energy density results in a cleaner surface but a larger pulse number is required, whereas high energy density can achieve higher cleaning efficiency but the temperature rise can cause surface oxidation and secondary contamination. In contrast to the KrF-excimer-laser, the pulsed CO2 laser is not effective in surface-cleaning. The mechanisms of laser cleaning may include laser photodecomposition, laser ablation and surface vibration due to the impact of the laser pulse. Laser cleaning provides a new dry process to clean different substrate surfaces and can replace the conventional wet cleaning processes such as ultrasonic cleaning with CFC and other organic solvents.

Original languageEnglish (US)
Pages (from-to)281-288
Number of pages8
JournalApplied Physics A Solids and Surfaces
Volume59
Issue number3
DOIs
StatePublished - Sep 1 1994

Fingerprint

Surface cleaning
Laser beam effects
Pulsed lasers
cleaning
Cleaning
pulsed lasers
Metals
irradiation
air
Air
metals
Lasers
lasers
Laser pulses
Excimer lasers
flux density
Ultrasonic cleaning
excimer lasers
metal surfaces
Chlorofluorocarbons

Keywords

  • 42.55.Gp
  • 81.60.-j
  • 82.50.Fv

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)
  • Physics and Astronomy (miscellaneous)

Cite this

Surface cleaning of metals by pulsed-laser irradiation in air. / Lu, Y. F.; Takai, M.; Komuro, S.; Shiokawa, T.; Aoyagi, Y.

In: Applied Physics A Solids and Surfaces, Vol. 59, No. 3, 01.09.1994, p. 281-288.

Research output: Contribution to journalArticle

Lu, Y. F. ; Takai, M. ; Komuro, S. ; Shiokawa, T. ; Aoyagi, Y. / Surface cleaning of metals by pulsed-laser irradiation in air. In: Applied Physics A Solids and Surfaces. 1994 ; Vol. 59, No. 3. pp. 281-288.
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