Summary Abstract: Surface analysis of amorphous Ta-Cu thin films deposited on GaAs

J. J. Pouch, S. A. Alterovitz, J. A. Woollam, J. E. Oh

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)983-984
Number of pages2
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume6
Issue number3
DOIs
StatePublished - May 1988

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Surface analysis
Thin films
thin films

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

Summary Abstract : Surface analysis of amorphous Ta-Cu thin films deposited on GaAs. / Pouch, J. J.; Alterovitz, S. A.; Woollam, J. A.; Oh, J. E.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 6, No. 3, 05.1988, p. 983-984.

Research output: Contribution to journalArticle

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