Summary Abstract

Interfacial properties of “diamondlike” Amorphous carbon films on InP: Metal-insulator-semiconductor structures

Jae E. Oh, Joel D. Lamb, Paul G. Snyder, John A Woollam

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)1022-1023
Number of pages2
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume4
Issue number3
DOIs
StatePublished - Jan 1 1986

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Carbon films
Amorphous carbon
MIS (semiconductors)
Amorphous films
Semiconductor materials
carbon
Metals

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

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title = "Summary Abstract: Interfacial properties of “diamondlike” Amorphous carbon films on InP: Metal-insulator-semiconductor structures",
author = "Oh, {Jae E.} and Lamb, {Joel D.} and Snyder, {Paul G.} and Woollam, {John A}",
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