Substrate effect on single carbon nanotube based infrared sensors

Liangliang Chen, Ning Xi, Ruiguo Yang, Bo Song, Zhanxin Zhou, Zhiyong Sun

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

Infrared (IR) sensors have been widely used for military and civil industry, while carbon nanotube (CNT) research progresses have been made in recent years. This led to investigation and development of CNT based IR detectors. In this paper, CNT-metal based Schottky barrier structure was designed to detect IR irradiance, and different interfacial layer, including SiO2, parylene-C, Si3N4, quartz, and polyimide, was used under CNT-metal contact to isolate substrate noise. The experimental results have shown that, the polymer based interfacial layer has strong substrate noise reduction on CNT IR sensor. The dark current is less than 0.3 nA under the condition of photocurrent 170 nA, noise at 0.5 nA when CNT-metal contact was fabricated on polyimide polymer due to substrate isolation and noise reduction.

Original languageEnglish (US)
Title of host publication2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
Pages250-253
Number of pages4
DOIs
StatePublished - Dec 1 2013
Externally publishedYes
Event2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013 - Beijing, China
Duration: Aug 5 2013Aug 8 2013

Publication series

NameProceedings of the IEEE Conference on Nanotechnology
ISSN (Print)1944-9399
ISSN (Electronic)1944-9380

Other

Other2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
CountryChina
CityBeijing
Period8/5/138/8/13

Fingerprint

Carbon Nanotubes
Carbon nanotubes
carbon nanotubes
Infrared radiation
sensors
Sensors
Substrates
Metals
Noise abatement
noise reduction
polyimides
Polyimides
electric contacts
Polymers
metals
Quartz
Infrared detectors
Dark currents
infrared detectors
polymers

ASJC Scopus subject areas

  • Bioengineering
  • Electrical and Electronic Engineering
  • Materials Chemistry
  • Condensed Matter Physics

Cite this

Chen, L., Xi, N., Yang, R., Song, B., Zhou, Z., & Sun, Z. (2013). Substrate effect on single carbon nanotube based infrared sensors. In 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013 (pp. 250-253). [6720955] (Proceedings of the IEEE Conference on Nanotechnology). https://doi.org/10.1109/NANO.2013.6720955

Substrate effect on single carbon nanotube based infrared sensors. / Chen, Liangliang; Xi, Ning; Yang, Ruiguo; Song, Bo; Zhou, Zhanxin; Sun, Zhiyong.

2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013. 2013. p. 250-253 6720955 (Proceedings of the IEEE Conference on Nanotechnology).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chen, L, Xi, N, Yang, R, Song, B, Zhou, Z & Sun, Z 2013, Substrate effect on single carbon nanotube based infrared sensors. in 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013., 6720955, Proceedings of the IEEE Conference on Nanotechnology, pp. 250-253, 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013, Beijing, China, 8/5/13. https://doi.org/10.1109/NANO.2013.6720955
Chen L, Xi N, Yang R, Song B, Zhou Z, Sun Z. Substrate effect on single carbon nanotube based infrared sensors. In 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013. 2013. p. 250-253. 6720955. (Proceedings of the IEEE Conference on Nanotechnology). https://doi.org/10.1109/NANO.2013.6720955
Chen, Liangliang ; Xi, Ning ; Yang, Ruiguo ; Song, Bo ; Zhou, Zhanxin ; Sun, Zhiyong. / Substrate effect on single carbon nanotube based infrared sensors. 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013. 2013. pp. 250-253 (Proceedings of the IEEE Conference on Nanotechnology).
@inproceedings{e4753ffd76d2451abc0d55ae14e509e5,
title = "Substrate effect on single carbon nanotube based infrared sensors",
abstract = "Infrared (IR) sensors have been widely used for military and civil industry, while carbon nanotube (CNT) research progresses have been made in recent years. This led to investigation and development of CNT based IR detectors. In this paper, CNT-metal based Schottky barrier structure was designed to detect IR irradiance, and different interfacial layer, including SiO2, parylene-C, Si3N4, quartz, and polyimide, was used under CNT-metal contact to isolate substrate noise. The experimental results have shown that, the polymer based interfacial layer has strong substrate noise reduction on CNT IR sensor. The dark current is less than 0.3 nA under the condition of photocurrent 170 nA, noise at 0.5 nA when CNT-metal contact was fabricated on polyimide polymer due to substrate isolation and noise reduction.",
author = "Liangliang Chen and Ning Xi and Ruiguo Yang and Bo Song and Zhanxin Zhou and Zhiyong Sun",
year = "2013",
month = "12",
day = "1",
doi = "10.1109/NANO.2013.6720955",
language = "English (US)",
isbn = "9781479906758",
series = "Proceedings of the IEEE Conference on Nanotechnology",
pages = "250--253",
booktitle = "2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013",

}

TY - GEN

T1 - Substrate effect on single carbon nanotube based infrared sensors

AU - Chen, Liangliang

AU - Xi, Ning

AU - Yang, Ruiguo

AU - Song, Bo

AU - Zhou, Zhanxin

AU - Sun, Zhiyong

PY - 2013/12/1

Y1 - 2013/12/1

N2 - Infrared (IR) sensors have been widely used for military and civil industry, while carbon nanotube (CNT) research progresses have been made in recent years. This led to investigation and development of CNT based IR detectors. In this paper, CNT-metal based Schottky barrier structure was designed to detect IR irradiance, and different interfacial layer, including SiO2, parylene-C, Si3N4, quartz, and polyimide, was used under CNT-metal contact to isolate substrate noise. The experimental results have shown that, the polymer based interfacial layer has strong substrate noise reduction on CNT IR sensor. The dark current is less than 0.3 nA under the condition of photocurrent 170 nA, noise at 0.5 nA when CNT-metal contact was fabricated on polyimide polymer due to substrate isolation and noise reduction.

AB - Infrared (IR) sensors have been widely used for military and civil industry, while carbon nanotube (CNT) research progresses have been made in recent years. This led to investigation and development of CNT based IR detectors. In this paper, CNT-metal based Schottky barrier structure was designed to detect IR irradiance, and different interfacial layer, including SiO2, parylene-C, Si3N4, quartz, and polyimide, was used under CNT-metal contact to isolate substrate noise. The experimental results have shown that, the polymer based interfacial layer has strong substrate noise reduction on CNT IR sensor. The dark current is less than 0.3 nA under the condition of photocurrent 170 nA, noise at 0.5 nA when CNT-metal contact was fabricated on polyimide polymer due to substrate isolation and noise reduction.

UR - http://www.scopus.com/inward/record.url?scp=84894169579&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84894169579&partnerID=8YFLogxK

U2 - 10.1109/NANO.2013.6720955

DO - 10.1109/NANO.2013.6720955

M3 - Conference contribution

SN - 9781479906758

T3 - Proceedings of the IEEE Conference on Nanotechnology

SP - 250

EP - 253

BT - 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013

ER -