Sub-micron patterning of aluminum films by laser ablation

David W. Doerr, Dennis R. Alexander

Research output: Contribution to journalConference article

2 Citations (Scopus)

Abstract

Microfabrication of sub-micron holes on 30 nm thick aluminum films on fused silica was investigated using pulse durations from 300 fs to 6 ns at 400 nm wavelength. Micromachines areas were investigated using atomic force microscopy (AFM) for quality and size of features produced. Ablation diameters less than 400 nm was achieved with all pulse widths. Pulses less than 5 ps removed the films cleanly and left a flat-bottomed crater with no evidence of substrate melting over a wide fluence range.

Original languageEnglish (US)
Pages (from-to)62-67
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3874
StatePublished - Dec 1 1999
EventProceedings of the 1999 Micromachining and Microfabrication Process Technology V - Santa Clara, CA, USA
Duration: Sep 20 1999Sep 22 1999

Fingerprint

Laser Ablation
Laser ablation
Patterning
Aluminum
laser ablation
pulse duration
aluminum
Microfabrication
Fused silica
Ablation
craters
ablation
Atomic force microscopy
Fused Silica
fluence
Melting
Atomic Force Microscopy
melting
atomic force microscopy
silicon dioxide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Sub-micron patterning of aluminum films by laser ablation. / Doerr, David W.; Alexander, Dennis R.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 3874, 01.12.1999, p. 62-67.

Research output: Contribution to journalConference article

@article{17381e6e24064d8592865d66fa71e51d,
title = "Sub-micron patterning of aluminum films by laser ablation",
abstract = "Microfabrication of sub-micron holes on 30 nm thick aluminum films on fused silica was investigated using pulse durations from 300 fs to 6 ns at 400 nm wavelength. Micromachines areas were investigated using atomic force microscopy (AFM) for quality and size of features produced. Ablation diameters less than 400 nm was achieved with all pulse widths. Pulses less than 5 ps removed the films cleanly and left a flat-bottomed crater with no evidence of substrate melting over a wide fluence range.",
author = "Doerr, {David W.} and Alexander, {Dennis R.}",
year = "1999",
month = "12",
day = "1",
language = "English (US)",
volume = "3874",
pages = "62--67",
journal = "Proceedings of SPIE - The International Society for Optical Engineering",
issn = "0277-786X",
publisher = "SPIE",

}

TY - JOUR

T1 - Sub-micron patterning of aluminum films by laser ablation

AU - Doerr, David W.

AU - Alexander, Dennis R.

PY - 1999/12/1

Y1 - 1999/12/1

N2 - Microfabrication of sub-micron holes on 30 nm thick aluminum films on fused silica was investigated using pulse durations from 300 fs to 6 ns at 400 nm wavelength. Micromachines areas were investigated using atomic force microscopy (AFM) for quality and size of features produced. Ablation diameters less than 400 nm was achieved with all pulse widths. Pulses less than 5 ps removed the films cleanly and left a flat-bottomed crater with no evidence of substrate melting over a wide fluence range.

AB - Microfabrication of sub-micron holes on 30 nm thick aluminum films on fused silica was investigated using pulse durations from 300 fs to 6 ns at 400 nm wavelength. Micromachines areas were investigated using atomic force microscopy (AFM) for quality and size of features produced. Ablation diameters less than 400 nm was achieved with all pulse widths. Pulses less than 5 ps removed the films cleanly and left a flat-bottomed crater with no evidence of substrate melting over a wide fluence range.

UR - http://www.scopus.com/inward/record.url?scp=0033352314&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033352314&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0033352314

VL - 3874

SP - 62

EP - 67

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

ER -