STUDY OF NEAR SURFACE STRUCTURE AND COMPOSITION FOR HIGH DOSE IMPLANTATION OF Cr** plus INTO Si.

F. Namavar, J. I. Budnick, H. C. Hayden, F. A. Otter, Y. Patarini

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations
Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposia Proceedings
PublisherNorth-Holland
Pages341-346
Number of pages6
ISBN (Print)0444008691
Publication statusPublished - Jan 1 1984

Publication series

NameMaterials Research Society Symposia Proceedings
Volume27
ISSN (Print)0272-9172

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Namavar, F., Budnick, J. I., Hayden, H. C., Otter, F. A., & Patarini, Y. (1984). STUDY OF NEAR SURFACE STRUCTURE AND COMPOSITION FOR HIGH DOSE IMPLANTATION OF Cr** plus INTO Si. In Materials Research Society Symposia Proceedings (pp. 341-346). (Materials Research Society Symposia Proceedings; Vol. 27). North-Holland.