STUDY OF NEAR SURFACE STRUCTURE AND COMPOSITION FOR HIGH DOSE IMPLANTATION OF Cr** plus INTO Si.

F. Namavar, J. I. Budnick, H. C. Hayden, F. A. Otter, Y. Patarini

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)
Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposia Proceedings
PublisherNorth-Holland
Pages341-346
Number of pages6
ISBN (Print)0444008691
StatePublished - Jan 1 1984

Publication series

NameMaterials Research Society Symposia Proceedings
Volume27
ISSN (Print)0272-9172

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Surface structure

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Namavar, F., Budnick, J. I., Hayden, H. C., Otter, F. A., & Patarini, Y. (1984). STUDY OF NEAR SURFACE STRUCTURE AND COMPOSITION FOR HIGH DOSE IMPLANTATION OF Cr** plus INTO Si. In Materials Research Society Symposia Proceedings (pp. 341-346). (Materials Research Society Symposia Proceedings; Vol. 27). North-Holland.

STUDY OF NEAR SURFACE STRUCTURE AND COMPOSITION FOR HIGH DOSE IMPLANTATION OF Cr** plus INTO Si. / Namavar, F.; Budnick, J. I.; Hayden, H. C.; Otter, F. A.; Patarini, Y.

Materials Research Society Symposia Proceedings. North-Holland, 1984. p. 341-346 (Materials Research Society Symposia Proceedings; Vol. 27).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Namavar, F, Budnick, JI, Hayden, HC, Otter, FA & Patarini, Y 1984, STUDY OF NEAR SURFACE STRUCTURE AND COMPOSITION FOR HIGH DOSE IMPLANTATION OF Cr** plus INTO Si. in Materials Research Society Symposia Proceedings. Materials Research Society Symposia Proceedings, vol. 27, North-Holland, pp. 341-346.
Namavar F, Budnick JI, Hayden HC, Otter FA, Patarini Y. STUDY OF NEAR SURFACE STRUCTURE AND COMPOSITION FOR HIGH DOSE IMPLANTATION OF Cr** plus INTO Si. In Materials Research Society Symposia Proceedings. North-Holland. 1984. p. 341-346. (Materials Research Society Symposia Proceedings).
Namavar, F. ; Budnick, J. I. ; Hayden, H. C. ; Otter, F. A. ; Patarini, Y. / STUDY OF NEAR SURFACE STRUCTURE AND COMPOSITION FOR HIGH DOSE IMPLANTATION OF Cr** plus INTO Si. Materials Research Society Symposia Proceedings. North-Holland, 1984. pp. 341-346 (Materials Research Society Symposia Proceedings).
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