Study of Mo-, Au-, and Ni-implanted molybdenum laser mirrors by multiple angle of incidence spectroscopic ellipsometry

Paul G. Snyder, Martin C. Rost, George H. Bu-Abbud, Jae Oh, John A. Woollam, David Poker, D. E. Aspnes, David Ingram, Peter Pronko

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Multiple angle of incidence spectroscopic ellipsometric data show that implantation of 150-keV molybdenum ions into polished molybdenum laser mirrors causes microscopic surface smoothing, and that most of the microscopic roughness is removed by a fluence of 5×1015 cm -2. Implantation of Au at 1 MeV significantly increases the microscopic roughness, and also changes the bulk optical properties. 3-MeV Ni ion implantation causes only small changes in the surface and bulk properties. A dielectric film, probably a hydrocarbon, is found to condense on the mirrors in a laboratory atmosphere.

Original languageEnglish (US)
Pages (from-to)779-788
Number of pages10
JournalJournal of Applied Physics
Volume60
Issue number2
DOIs
StatePublished - Dec 1 1986

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ellipsometry
molybdenum
implantation
roughness
incidence
mirrors
causes
smoothing
surface properties
lasers
ion implantation
fluence
hydrocarbons
optical properties
atmospheres
ions

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Study of Mo-, Au-, and Ni-implanted molybdenum laser mirrors by multiple angle of incidence spectroscopic ellipsometry. / Snyder, Paul G.; Rost, Martin C.; Bu-Abbud, George H.; Oh, Jae; Woollam, John A.; Poker, David; Aspnes, D. E.; Ingram, David; Pronko, Peter.

In: Journal of Applied Physics, Vol. 60, No. 2, 01.12.1986, p. 779-788.

Research output: Contribution to journalArticle

Snyder, PG, Rost, MC, Bu-Abbud, GH, Oh, J, Woollam, JA, Poker, D, Aspnes, DE, Ingram, D & Pronko, P 1986, 'Study of Mo-, Au-, and Ni-implanted molybdenum laser mirrors by multiple angle of incidence spectroscopic ellipsometry', Journal of Applied Physics, vol. 60, no. 2, pp. 779-788. https://doi.org/10.1063/1.337429
Snyder, Paul G. ; Rost, Martin C. ; Bu-Abbud, George H. ; Oh, Jae ; Woollam, John A. ; Poker, David ; Aspnes, D. E. ; Ingram, David ; Pronko, Peter. / Study of Mo-, Au-, and Ni-implanted molybdenum laser mirrors by multiple angle of incidence spectroscopic ellipsometry. In: Journal of Applied Physics. 1986 ; Vol. 60, No. 2. pp. 779-788.
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