Study of Mo-, Au-, and Ni-implanted molybdenum laser mirrors by multiple angle of incidence spectroscopic ellipsometry

Paul G. Snyder, Martin C. Rost, George H. Bu-Abbud, Jae Oh, John A. Woollam, David Poker, D. E. Aspnes, David Ingram, Peter Pronko

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Abstract

Multiple angle of incidence spectroscopic ellipsometric data show that implantation of 150-keV molybdenum ions into polished molybdenum laser mirrors causes microscopic surface smoothing, and that most of the microscopic roughness is removed by a fluence of 5×1015 cm -2. Implantation of Au at 1 MeV significantly increases the microscopic roughness, and also changes the bulk optical properties. 3-MeV Ni ion implantation causes only small changes in the surface and bulk properties. A dielectric film, probably a hydrocarbon, is found to condense on the mirrors in a laboratory atmosphere.

Original languageEnglish (US)
Pages (from-to)779-788
Number of pages10
JournalJournal of Applied Physics
Volume60
Issue number2
DOIs
Publication statusPublished - Dec 1 1986

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

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