STUDY OF ION IMPLANTED COPPER LASER MIRRORS BY SPECTROSCOPIC ELLIPSOMETRY.

P. G. Snyder, A. Massengale, K. Memarzadeh, John A Woollam, D. C. Ingram, P. P. Pronko

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

Implantation with 400 keV Ag or Cu ions improves the near-surface microstructural quality and reflectance of diamond turned and mechanically polished flat copper laser mirrors. Spectroscopic ellipsometry is sensitive to changes in either the microscopic surface roughness, or in the near-surface substrate void fraction, and both parameters are observed to change upon implantation. Substrate density as a function of ion fluence peaks at about 5 multiplied by 10**1**5cm** minus **2. Low energy (300 eV) Ar ion implantation can cause either a reduction or increase in microscopic surface roughness, depending on fluence.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposia Proceedings
EditorsMichael O. Thompson, S.Thomas Picraux, James S. Williams
PublisherMaterials Research Soc
Pages535-540
Number of pages6
ISBN (Print)0931837405
StatePublished - Dec 1 1987
EventBeam-Solid Interact and Transient Processes - Boston, MA, USA
Duration: Dec 1 1986Dec 4 1986

Publication series

NameMaterials Research Society Symposia Proceedings
Volume74
ISSN (Print)0272-9172

Other

OtherBeam-Solid Interact and Transient Processes
CityBoston, MA, USA
Period12/1/8612/4/86

Fingerprint

Laser mirrors
Spectroscopic ellipsometry
Ion implantation
Copper
Surface roughness
Ions
Diamond
Void fraction
Substrates
Diamonds

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Snyder, P. G., Massengale, A., Memarzadeh, K., Woollam, J. A., Ingram, D. C., & Pronko, P. P. (1987). STUDY OF ION IMPLANTED COPPER LASER MIRRORS BY SPECTROSCOPIC ELLIPSOMETRY. In M. O. Thompson, S. T. Picraux, & J. S. Williams (Eds.), Materials Research Society Symposia Proceedings (pp. 535-540). (Materials Research Society Symposia Proceedings; Vol. 74). Materials Research Soc.

STUDY OF ION IMPLANTED COPPER LASER MIRRORS BY SPECTROSCOPIC ELLIPSOMETRY. / Snyder, P. G.; Massengale, A.; Memarzadeh, K.; Woollam, John A; Ingram, D. C.; Pronko, P. P.

Materials Research Society Symposia Proceedings. ed. / Michael O. Thompson; S.Thomas Picraux; James S. Williams. Materials Research Soc, 1987. p. 535-540 (Materials Research Society Symposia Proceedings; Vol. 74).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Snyder, PG, Massengale, A, Memarzadeh, K, Woollam, JA, Ingram, DC & Pronko, PP 1987, STUDY OF ION IMPLANTED COPPER LASER MIRRORS BY SPECTROSCOPIC ELLIPSOMETRY. in MO Thompson, ST Picraux & JS Williams (eds), Materials Research Society Symposia Proceedings. Materials Research Society Symposia Proceedings, vol. 74, Materials Research Soc, pp. 535-540, Beam-Solid Interact and Transient Processes, Boston, MA, USA, 12/1/86.
Snyder PG, Massengale A, Memarzadeh K, Woollam JA, Ingram DC, Pronko PP. STUDY OF ION IMPLANTED COPPER LASER MIRRORS BY SPECTROSCOPIC ELLIPSOMETRY. In Thompson MO, Picraux ST, Williams JS, editors, Materials Research Society Symposia Proceedings. Materials Research Soc. 1987. p. 535-540. (Materials Research Society Symposia Proceedings).
Snyder, P. G. ; Massengale, A. ; Memarzadeh, K. ; Woollam, John A ; Ingram, D. C. ; Pronko, P. P. / STUDY OF ION IMPLANTED COPPER LASER MIRRORS BY SPECTROSCOPIC ELLIPSOMETRY. Materials Research Society Symposia Proceedings. editor / Michael O. Thompson ; S.Thomas Picraux ; James S. Williams. Materials Research Soc, 1987. pp. 535-540 (Materials Research Society Symposia Proceedings).
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