Study of gap control and electrostatic force in nano electro machining

Abdallah H. Alkhaleel, Murali M. Sundaram, Kamlakar P Rajurkar, Ajay P. Malshe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The potential of nanotechnology depends on the controllable fabrication, integration, and stability of nanoscale devices. The creation of nanoscale features is essential for the fabrication of these devices. This paper describes the use of the atomic force microscope (AFM) to electro-machine nano-cavities on copper samples. Using known interelectrode gap, cavities as small as 200 nm in diameter were machined. A study was conducted to check the stability of the machined cavities. The results showed that cavities were stable within the period of time of the study (48 hours) in both air and deionized water environments. Feature destruction when occurred was found to be due to mechanical forces exerted on the sample by the scanning tip during the repeated scanning of the sample. The effect of electrostatic forces on the machining process was examined as well. It was found that the application of low frequency excitations (KHz range) resulted in undesirable cantilever oscillations and hence high frequency excitations (MHz range) are prefered.

Original languageEnglish (US)
Title of host publicationProceedings of the 22nd Annual ASPE Meeting, ASPE 2007
StatePublished - Dec 1 2007
Event22nd Annual Meeting of the American Society for Precision Engineering, ASPE 2007 - Dallas, TX, United States
Duration: Oct 14 2007Oct 19 2007

Publication series

NameProceedings of the 22nd Annual ASPE Meeting, ASPE 2007

Conference

Conference22nd Annual Meeting of the American Society for Precision Engineering, ASPE 2007
CountryUnited States
CityDallas, TX
Period10/14/0710/19/07

Fingerprint

Electrostatic force
Machining
Scanning
Fabrication
Deionized water
Nanotechnology
Microscopes
Copper
Air

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

Alkhaleel, A. H., Sundaram, M. M., Rajurkar, K. P., & Malshe, A. P. (2007). Study of gap control and electrostatic force in nano electro machining. In Proceedings of the 22nd Annual ASPE Meeting, ASPE 2007 (Proceedings of the 22nd Annual ASPE Meeting, ASPE 2007).

Study of gap control and electrostatic force in nano electro machining. / Alkhaleel, Abdallah H.; Sundaram, Murali M.; Rajurkar, Kamlakar P; Malshe, Ajay P.

Proceedings of the 22nd Annual ASPE Meeting, ASPE 2007. 2007. (Proceedings of the 22nd Annual ASPE Meeting, ASPE 2007).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Alkhaleel, AH, Sundaram, MM, Rajurkar, KP & Malshe, AP 2007, Study of gap control and electrostatic force in nano electro machining. in Proceedings of the 22nd Annual ASPE Meeting, ASPE 2007. Proceedings of the 22nd Annual ASPE Meeting, ASPE 2007, 22nd Annual Meeting of the American Society for Precision Engineering, ASPE 2007, Dallas, TX, United States, 10/14/07.
Alkhaleel AH, Sundaram MM, Rajurkar KP, Malshe AP. Study of gap control and electrostatic force in nano electro machining. In Proceedings of the 22nd Annual ASPE Meeting, ASPE 2007. 2007. (Proceedings of the 22nd Annual ASPE Meeting, ASPE 2007).
Alkhaleel, Abdallah H. ; Sundaram, Murali M. ; Rajurkar, Kamlakar P ; Malshe, Ajay P. / Study of gap control and electrostatic force in nano electro machining. Proceedings of the 22nd Annual ASPE Meeting, ASPE 2007. 2007. (Proceedings of the 22nd Annual ASPE Meeting, ASPE 2007).
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