Studies of metallic multilayer structures, optical properties, and oxidation using in situ spectroscopic ellipsometry

Xiang Gao, Jeff Hale, Scott Heckens, John A. Woollam

Research output: Contribution to journalArticle

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Abstract

In situ spectroscopic ellipsometry (SE) has been successfully used to accurately measure sputter deposition rates and optical constants of un-oxidized metal layers and to control the growth of magnetic multilayers. The structures include [Co/Cu]n, [Co/Au]n, [Co/Ni]n, [Co/Pd]n and [Co/Pd/ Au]n. Layer thickness precision is better than ±0.05 nm for layer thicknesses in the range of 0.2 nm to 10 nm. Closed-loop feedback control of layer thickness is also demonstrated. Good consistency was obtained by comparing the in situ SE results to x-ray diffraction measurements. Dynamic oxidation studies of [Co/Au]n and [Co/Ni]n multilayer structures are also presented.

Original languageEnglish (US)
Pages (from-to)429-435
Number of pages7
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume16
Issue number2
DOIs
Publication statusPublished - Jan 1 1998

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ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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