Spherical silicon-shell photonic band gap structures fabricated by laser-assisted chemical vapor deposition

H. Wang, Z. Y. Yang, Y. F. Lu

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Laser-assisted chemical vapor deposition was applied in fabricating three-dimensional (3D) spherical-shell photonic band gap (PBG) structures by depositing silicon shells covering silica particles, which had been self-assembled into 3D colloidal crystals. The colloidal crystals of self-assembled silica particles were formed on silicon substrates using the isothermal heating evaporation approach. A continuous wave Nd:YAG laser (1064 nm wavelength) was used to deposit silicon shells by thermally decomposing disilane gas. Periodic silicon-shellsilica-particle PBG structures were obtained. By removing the silica particles enclosed in the silicon shells using hydrofluoric acid, hollow spherical silicon-shell arrays were produced. This technique is capable of fabricating structures with complete photonic band gaps, which is predicted by simulations with the plane wave method. The techniques developed in this study have the potential to flexibly engineer the positions of the PBGs by varying both the silica particle size and the silicon-shell thickness. Ellipsometry was used to investigate the specific photonic band gaps for both structures.

Original languageEnglish (US)
Article number033129
JournalJournal of Applied Physics
Volume101
Issue number3
DOIs
StatePublished - Feb 26 2007

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vapor deposition
photonics
silicon
lasers
silicon dioxide
spherical shells
continuous wave lasers
hydrofluoric acid
engineers
ellipsometry
crystals
YAG lasers
hollow
plane waves
coverings
deposits
evaporation
heating
gases
wavelengths

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Spherical silicon-shell photonic band gap structures fabricated by laser-assisted chemical vapor deposition. / Wang, H.; Yang, Z. Y.; Lu, Y. F.

In: Journal of Applied Physics, Vol. 101, No. 3, 033129, 26.02.2007.

Research output: Contribution to journalArticle

@article{cdeac20a6bb948639f41f9fe1c8a7e13,
title = "Spherical silicon-shell photonic band gap structures fabricated by laser-assisted chemical vapor deposition",
abstract = "Laser-assisted chemical vapor deposition was applied in fabricating three-dimensional (3D) spherical-shell photonic band gap (PBG) structures by depositing silicon shells covering silica particles, which had been self-assembled into 3D colloidal crystals. The colloidal crystals of self-assembled silica particles were formed on silicon substrates using the isothermal heating evaporation approach. A continuous wave Nd:YAG laser (1064 nm wavelength) was used to deposit silicon shells by thermally decomposing disilane gas. Periodic silicon-shellsilica-particle PBG structures were obtained. By removing the silica particles enclosed in the silicon shells using hydrofluoric acid, hollow spherical silicon-shell arrays were produced. This technique is capable of fabricating structures with complete photonic band gaps, which is predicted by simulations with the plane wave method. The techniques developed in this study have the potential to flexibly engineer the positions of the PBGs by varying both the silica particle size and the silicon-shell thickness. Ellipsometry was used to investigate the specific photonic band gaps for both structures.",
author = "H. Wang and Yang, {Z. Y.} and Lu, {Y. F.}",
year = "2007",
month = "2",
day = "26",
doi = "10.1063/1.2472648",
language = "English (US)",
volume = "101",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "3",

}

TY - JOUR

T1 - Spherical silicon-shell photonic band gap structures fabricated by laser-assisted chemical vapor deposition

AU - Wang, H.

AU - Yang, Z. Y.

AU - Lu, Y. F.

PY - 2007/2/26

Y1 - 2007/2/26

N2 - Laser-assisted chemical vapor deposition was applied in fabricating three-dimensional (3D) spherical-shell photonic band gap (PBG) structures by depositing silicon shells covering silica particles, which had been self-assembled into 3D colloidal crystals. The colloidal crystals of self-assembled silica particles were formed on silicon substrates using the isothermal heating evaporation approach. A continuous wave Nd:YAG laser (1064 nm wavelength) was used to deposit silicon shells by thermally decomposing disilane gas. Periodic silicon-shellsilica-particle PBG structures were obtained. By removing the silica particles enclosed in the silicon shells using hydrofluoric acid, hollow spherical silicon-shell arrays were produced. This technique is capable of fabricating structures with complete photonic band gaps, which is predicted by simulations with the plane wave method. The techniques developed in this study have the potential to flexibly engineer the positions of the PBGs by varying both the silica particle size and the silicon-shell thickness. Ellipsometry was used to investigate the specific photonic band gaps for both structures.

AB - Laser-assisted chemical vapor deposition was applied in fabricating three-dimensional (3D) spherical-shell photonic band gap (PBG) structures by depositing silicon shells covering silica particles, which had been self-assembled into 3D colloidal crystals. The colloidal crystals of self-assembled silica particles were formed on silicon substrates using the isothermal heating evaporation approach. A continuous wave Nd:YAG laser (1064 nm wavelength) was used to deposit silicon shells by thermally decomposing disilane gas. Periodic silicon-shellsilica-particle PBG structures were obtained. By removing the silica particles enclosed in the silicon shells using hydrofluoric acid, hollow spherical silicon-shell arrays were produced. This technique is capable of fabricating structures with complete photonic band gaps, which is predicted by simulations with the plane wave method. The techniques developed in this study have the potential to flexibly engineer the positions of the PBGs by varying both the silica particle size and the silicon-shell thickness. Ellipsometry was used to investigate the specific photonic band gaps for both structures.

UR - http://www.scopus.com/inward/record.url?scp=33847142249&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33847142249&partnerID=8YFLogxK

U2 - 10.1063/1.2472648

DO - 10.1063/1.2472648

M3 - Article

AN - SCOPUS:33847142249

VL - 101

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 3

M1 - 033129

ER -