Spectroscopic ellipsometry in optical coatings manufacturing

J. N. Hilfiker, J. S. Hale, B. D. Johs, T. E. Tiwald, R. A. Synowicki, C. L. Bungay, J. A. Woollam

Research output: Contribution to journalConference article

3 Citations (Scopus)

Abstract

This paper reviews the present status of spectroscopic ellipsometry (SE) as a metrology tool in production of optical coatings. Spectroscopic ellipsometry is often used to determine optical constants and layer thickness for single or multilayered stacks. Both ex situ and in situ SE results will be discussed. Ex situ SE has been used for optical coatings for many years, and is still an important characterization tool. A greatly expanded spectral range is now available, including vacuum-ultraviolet to the far infrared. In situ SE generally covers a narrower spectral range; however data acquisition can include hundreds of wavelengths simultaneously in less than a second. This allows closed-loop feedback process control and large area mapping of material properties on a short time scale.

Original languageEnglish (US)
Pages (from-to)295-300
Number of pages6
JournalProceedings, Annual Technical Conference - Society of Vacuum Coaters
StatePublished - Jan 1 2001
Event44th Annual Technical Conference Prodeedings - Philadelphia, PA, United States
Duration: Apr 21 2001Apr 26 2001

Fingerprint

Optical coatings
optical coatings
Spectroscopic ellipsometry
ellipsometry
manufacturing
Optical constants
metrology
data acquisition
Process control
Data acquisition
Materials properties
Vacuum
Infrared radiation
Feedback
Wavelength
vacuum
wavelengths

Keywords

  • Coating thickness
  • Optical constants
  • Process control
  • Spectroscopic ellipsometry

ASJC Scopus subject areas

  • Mechanical Engineering
  • Surfaces and Interfaces
  • Fluid Flow and Transfer Processes
  • Surfaces, Coatings and Films

Cite this

Hilfiker, J. N., Hale, J. S., Johs, B. D., Tiwald, T. E., Synowicki, R. A., Bungay, C. L., & Woollam, J. A. (2001). Spectroscopic ellipsometry in optical coatings manufacturing. Proceedings, Annual Technical Conference - Society of Vacuum Coaters, 295-300.

Spectroscopic ellipsometry in optical coatings manufacturing. / Hilfiker, J. N.; Hale, J. S.; Johs, B. D.; Tiwald, T. E.; Synowicki, R. A.; Bungay, C. L.; Woollam, J. A.

In: Proceedings, Annual Technical Conference - Society of Vacuum Coaters, 01.01.2001, p. 295-300.

Research output: Contribution to journalConference article

Hilfiker, JN, Hale, JS, Johs, BD, Tiwald, TE, Synowicki, RA, Bungay, CL & Woollam, JA 2001, 'Spectroscopic ellipsometry in optical coatings manufacturing', Proceedings, Annual Technical Conference - Society of Vacuum Coaters, pp. 295-300.
Hilfiker JN, Hale JS, Johs BD, Tiwald TE, Synowicki RA, Bungay CL et al. Spectroscopic ellipsometry in optical coatings manufacturing. Proceedings, Annual Technical Conference - Society of Vacuum Coaters. 2001 Jan 1;295-300.
Hilfiker, J. N. ; Hale, J. S. ; Johs, B. D. ; Tiwald, T. E. ; Synowicki, R. A. ; Bungay, C. L. ; Woollam, J. A. / Spectroscopic ellipsometry in optical coatings manufacturing. In: Proceedings, Annual Technical Conference - Society of Vacuum Coaters. 2001 ; pp. 295-300.
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