Single-pulse femtosecond laser Bessel beams drilling of high-aspect-ratio microholes based on electron dynamics control

Weiwei Zhao, Xiaowei Li, Bo Xia, Xueliang Yan, Weina Han, Yongfeng Lu, Lan Jiang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

Microholes drilling has attracted extensive research efforts for its broad applications in photonics, microfluidics, optical fibers and many other fields. A femtosecond (fs) laser is a promising tool for high-precision materials processing with reduced recast/microcracks and minimized heat affected zones. But there remain many challenges in hole drilling using conventional fs laser with Gaussian beams, such as low aspect ratio and taper effects. We report small-diameter and high-aspect-ratio microholes with taper free drilling in PMMA (polymethyl methacrylate) using single-pulse fs laser Bessel beams. Axicon is used to transform Gaussian beams into Bessel beams, which then irradiate in the sample by a telescope consisting of plano-convex lens and microscope objective. Using this technique, we enhance the aspect ratio of microholes by 55 times as compared with Gaussian beams. We attribute this high aspect ratio and high quality microholes formation to the unique spatial intensity distribution and propagation stability of Bessel beams, which can effectively adjust the transient localized electron density distribution leading to a long and uniform localized-interacted zone. By using the optimized pulse energy and focal depth position, the microholes diameter ranges between 1.4-2.1 μm and the aspect ratio can exceed 460. This efficient technique is of great potentials for fabrication of microphotonics devices and microfluidics.

Original languageEnglish (US)
Title of host publicationInternational Symposium on Optoelectronic Technology and Application 2014
Subtitle of host publicationAdvanced Display Technology; and Nonimaging Optics: Efficient Design for Illumination and Solar Concentration
EditorsRoland Winston, Yongtian Wang, Yi Luo, Byoungho Lee, Yong Bi, Ting-Chung Poon
PublisherSPIE
ISBN (Electronic)9781628413823
DOIs
Publication statusPublished - Jan 1 2014
EventInternational Symposium on Optoelectronic Technology and Application 2014 - Advanced Display Technology; and Nonimaging Optics: Efficient Design for Illumination and Solar Concentration, IPTA 2014 - Beijing, China
Duration: May 13 2014May 15 2014

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9296
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceInternational Symposium on Optoelectronic Technology and Application 2014 - Advanced Display Technology; and Nonimaging Optics: Efficient Design for Illumination and Solar Concentration, IPTA 2014
CountryChina
CityBeijing
Period5/13/145/15/14

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Keywords

  • Bessel beams
  • Femtosecond laser
  • High aspect ratio
  • Single pulse

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Zhao, W., Li, X., Xia, B., Yan, X., Han, W., Lu, Y., & Jiang, L. (2014). Single-pulse femtosecond laser Bessel beams drilling of high-aspect-ratio microholes based on electron dynamics control. In R. Winston, Y. Wang, Y. Luo, B. Lee, Y. Bi, & T-C. Poon (Eds.), International Symposium on Optoelectronic Technology and Application 2014: Advanced Display Technology; and Nonimaging Optics: Efficient Design for Illumination and Solar Concentration [92960Q] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9296). SPIE. https://doi.org/10.1117/12.2073604