Simulation of the growth of CVD films

Jacob J. Thiart, Vladimir Hlavacek, Hendrik J Viljoen

Research output: Contribution to journalArticle

6 Scopus citations
Original languageEnglish (US)
Pages (from-to)3493-3497
Number of pages5
JournalChemical Engineering Science
Issue number21
Publication statusPublished - Nov 1995

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)
  • Industrial and Manufacturing Engineering

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