Silicon optical waveguides with buried-CoSi2 cladding layers

R. A. Soref, F. Namavar, N. M. Kalkhoran, D. M. Koker

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

We report a new Si waveguide that has a buried, metallike cladding. Infrared light propagates in a crystal Si layer atop a 50-nm film of buried CoSi2 formed by implantation. Experiments in a 20-μm Si structure at the 1.3-μm wavelength show propagation losses below 2.5 dB/cm for TE0 and TM0. Results agree with theory. We also constructed two vertically integrated Si slab waveguides bounded below by CoSi2 cladding layers.

Original languageEnglish (US)
Pages (from-to)1319-1321
Number of pages3
JournalOptics Letters
Volume19
Issue number17
DOIs
StatePublished - Sep 1994

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optical waveguides
waveguides
silicon
implantation
slabs
propagation
wavelengths
crystals

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Soref, R. A., Namavar, F., Kalkhoran, N. M., & Koker, D. M. (1994). Silicon optical waveguides with buried-CoSi2 cladding layers. Optics Letters, 19(17), 1319-1321. https://doi.org/10.1364/OL.19.001319

Silicon optical waveguides with buried-CoSi2 cladding layers. / Soref, R. A.; Namavar, F.; Kalkhoran, N. M.; Koker, D. M.

In: Optics Letters, Vol. 19, No. 17, 09.1994, p. 1319-1321.

Research output: Contribution to journalArticle

Soref, RA, Namavar, F, Kalkhoran, NM & Koker, DM 1994, 'Silicon optical waveguides with buried-CoSi2 cladding layers', Optics Letters, vol. 19, no. 17, pp. 1319-1321. https://doi.org/10.1364/OL.19.001319
Soref RA, Namavar F, Kalkhoran NM, Koker DM. Silicon optical waveguides with buried-CoSi2 cladding layers. Optics Letters. 1994 Sep;19(17):1319-1321. https://doi.org/10.1364/OL.19.001319
Soref, R. A. ; Namavar, F. ; Kalkhoran, N. M. ; Koker, D. M. / Silicon optical waveguides with buried-CoSi2 cladding layers. In: Optics Letters. 1994 ; Vol. 19, No. 17. pp. 1319-1321.
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