Si pillar structured thermal neutron detectors: Fabrication challenges and performance expectations

R. J. Nikolic, Q. Shao, L. F. Voss, A. M. Conway, R. Radev, T. F. Wang, M. Dar, N. Deo, C. L. Cheung, L. Fabris, C. L. Britton, M. N. Ericson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)

Abstract

Solid-state thermal neutron detectors are desired to replace 3He tube tube-based technology for the detection of special nuclear materials. 3He tubes have some issues with stability, sensitivity to microphonics and very recently, a shortage of 3He. There are numerous solid-state approaches being investigated that utilize various architectures and material combinations. Our approach is based on the combination of high-aspect-ratio silicon PIN pillars, which are 2 μm wide with a 2 μm separation, arranged in a square matrix, and surrounded by 10B, the neutron converter material. To date, our highest efficiency is ∼ 20 % for a pillar height of 26 μm. An efficiency of greater than 50 % is predicted for our device, while maintaining high gamma rejection and low power operation once adequate device scaling is carried out. Estimated required pillar height to meet this goal is ∼ 50 μm. The fabrication challenges related to 10B deposition and etching as well as planarization of the three-dimensional structure is discussed.

Original languageEnglish (US)
Title of host publicationMicro- and Nanotechnology Sensors, Systems, and Applications III
DOIs
StatePublished - Jun 9 2011
EventMicro- and Nanotechnology Sensors, Systems, and Applications III - Orlando, FL, United States
Duration: Apr 25 2011Apr 29 2011

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8031
ISSN (Print)0277-786X

Conference

ConferenceMicro- and Nanotechnology Sensors, Systems, and Applications III
CountryUnited States
CityOrlando, FL
Period4/25/114/29/11

Fingerprint

Neutron detectors
neutron counters
thermal neutrons
Neutron
Fabrication
Tube
Detector
tubes
fabrication
Microphonism
Planarization
solid state
Square matrix
Silicon
Shortage
Etching
high aspect ratio
Rejection
Converter
Aspect Ratio

Keywords

  • Thermal neutron detector
  • boron-10
  • helium tube replacements
  • pillar

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Nikolic, R. J., Shao, Q., Voss, L. F., Conway, A. M., Radev, R., Wang, T. F., ... Ericson, M. N. (2011). Si pillar structured thermal neutron detectors: Fabrication challenges and performance expectations. In Micro- and Nanotechnology Sensors, Systems, and Applications III [803109] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8031). https://doi.org/10.1117/12.885880

Si pillar structured thermal neutron detectors : Fabrication challenges and performance expectations. / Nikolic, R. J.; Shao, Q.; Voss, L. F.; Conway, A. M.; Radev, R.; Wang, T. F.; Dar, M.; Deo, N.; Cheung, C. L.; Fabris, L.; Britton, C. L.; Ericson, M. N.

Micro- and Nanotechnology Sensors, Systems, and Applications III. 2011. 803109 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8031).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nikolic, RJ, Shao, Q, Voss, LF, Conway, AM, Radev, R, Wang, TF, Dar, M, Deo, N, Cheung, CL, Fabris, L, Britton, CL & Ericson, MN 2011, Si pillar structured thermal neutron detectors: Fabrication challenges and performance expectations. in Micro- and Nanotechnology Sensors, Systems, and Applications III., 803109, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III, Orlando, FL, United States, 4/25/11. https://doi.org/10.1117/12.885880
Nikolic RJ, Shao Q, Voss LF, Conway AM, Radev R, Wang TF et al. Si pillar structured thermal neutron detectors: Fabrication challenges and performance expectations. In Micro- and Nanotechnology Sensors, Systems, and Applications III. 2011. 803109. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.885880
Nikolic, R. J. ; Shao, Q. ; Voss, L. F. ; Conway, A. M. ; Radev, R. ; Wang, T. F. ; Dar, M. ; Deo, N. ; Cheung, C. L. ; Fabris, L. ; Britton, C. L. ; Ericson, M. N. / Si pillar structured thermal neutron detectors : Fabrication challenges and performance expectations. Micro- and Nanotechnology Sensors, Systems, and Applications III. 2011. (Proceedings of SPIE - The International Society for Optical Engineering).
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