Self-calibrating modulation ellipsometer

Stephen Ducharme, Hassanayn Machlab, Paul G. Snyder, John A. Woollam, Ron A. Synowicki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A new self-calibrating modulation ellipsometer (SCME) has demonstrated outstanding accuracy, utility, reliability, and speed. The ellipsometer is well suited to in-situ monitoring of surface degradation, film growth or etching, and quality control. The design incorporates several novel features including: (1) full self calibration, (2) high speed, (3) high accuracy, (4) high signal-to-noise ratio, (5) compactness, (6) reliability, and (7) no moving parts. The design is portable, can be fully automated, and is suitable for use in remote and harsh environments. A complete prototype instrument incorporates all optical components, mechanical mounts with flexible configuration options, custom electronic components, signal acquisition, computer control, data analysis, and a user interface, all integrated into a self-contained, user-friendly, system. It operates at fixed wavelength and incidence angle, though both can be changed by the operator in a few minutes as desired. Quantitative testing verified the absolute accuracy and suitability for monitoring real-time in-situ film growth and etching.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsRamon P. DePaula, John W.III Berthold
Pages373-384
Number of pages12
Publication statusPublished - Dec 1 1996
EventFiber Optic and Laser Sensors XIV - Denver, CO, USA
Duration: Aug 7 1996Aug 9 1996

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume2839
ISSN (Print)0277-786X

Other

OtherFiber Optic and Laser Sensors XIV
CityDenver, CO, USA
Period8/7/968/9/96

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Ducharme, S., Machlab, H., Snyder, P. G., Woollam, J. A., & Synowicki, R. A. (1996). Self-calibrating modulation ellipsometer. In R. P. DePaula, & J. W. III. Berthold (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (pp. 373-384). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2839).