Self-calibrating modulation ellipsometer

Stephen Ducharme, Hassanayn Machlab, Paul G. Snyder, John A Woollam, Ron A. Synowicki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A new self-calibrating modulation ellipsometer (SCME) has demonstrated outstanding accuracy, utility, reliability, and speed. The ellipsometer is well suited to in-situ monitoring of surface degradation, film growth or etching, and quality control. The design incorporates several novel features including: (1) full self calibration, (2) high speed, (3) high accuracy, (4) high signal-to-noise ratio, (5) compactness, (6) reliability, and (7) no moving parts. The design is portable, can be fully automated, and is suitable for use in remote and harsh environments. A complete prototype instrument incorporates all optical components, mechanical mounts with flexible configuration options, custom electronic components, signal acquisition, computer control, data analysis, and a user interface, all integrated into a self-contained, user-friendly, system. It operates at fixed wavelength and incidence angle, though both can be changed by the operator in a few minutes as desired. Quantitative testing verified the absolute accuracy and suitability for monitoring real-time in-situ film growth and etching.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsRamon P. DePaula, John W.III Berthold
Pages373-384
Number of pages12
StatePublished - Dec 1 1996
EventFiber Optic and Laser Sensors XIV - Denver, CO, USA
Duration: Aug 7 1996Aug 9 1996

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume2839
ISSN (Print)0277-786X

Other

OtherFiber Optic and Laser Sensors XIV
CityDenver, CO, USA
Period8/7/968/9/96

Fingerprint

ellipsometers
Film growth
calibrating
Etching
Modulation
modulation
Monitoring
Computer control
etching
User interfaces
Quality control
Signal to noise ratio
Calibration
void ratio
quality control
Degradation
Wavelength
acquisition
Testing
signal to noise ratios

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Ducharme, S., Machlab, H., Snyder, P. G., Woollam, J. A., & Synowicki, R. A. (1996). Self-calibrating modulation ellipsometer. In R. P. DePaula, & J. W. III. Berthold (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (pp. 373-384). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2839).

Self-calibrating modulation ellipsometer. / Ducharme, Stephen; Machlab, Hassanayn; Snyder, Paul G.; Woollam, John A; Synowicki, Ron A.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / Ramon P. DePaula; John W.III Berthold. 1996. p. 373-384 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2839).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ducharme, S, Machlab, H, Snyder, PG, Woollam, JA & Synowicki, RA 1996, Self-calibrating modulation ellipsometer. in RP DePaula & JWIII Berthold (eds), Proceedings of SPIE - The International Society for Optical Engineering. Proceedings of SPIE - The International Society for Optical Engineering, vol. 2839, pp. 373-384, Fiber Optic and Laser Sensors XIV, Denver, CO, USA, 8/7/96.
Ducharme S, Machlab H, Snyder PG, Woollam JA, Synowicki RA. Self-calibrating modulation ellipsometer. In DePaula RP, Berthold JWIII, editors, Proceedings of SPIE - The International Society for Optical Engineering. 1996. p. 373-384. (Proceedings of SPIE - The International Society for Optical Engineering).
Ducharme, Stephen ; Machlab, Hassanayn ; Snyder, Paul G. ; Woollam, John A ; Synowicki, Ron A. / Self-calibrating modulation ellipsometer. Proceedings of SPIE - The International Society for Optical Engineering. editor / Ramon P. DePaula ; John W.III Berthold. 1996. pp. 373-384 (Proceedings of SPIE - The International Society for Optical Engineering).
@inproceedings{065435d6410d4334800e1487c4d3af2a,
title = "Self-calibrating modulation ellipsometer",
abstract = "A new self-calibrating modulation ellipsometer (SCME) has demonstrated outstanding accuracy, utility, reliability, and speed. The ellipsometer is well suited to in-situ monitoring of surface degradation, film growth or etching, and quality control. The design incorporates several novel features including: (1) full self calibration, (2) high speed, (3) high accuracy, (4) high signal-to-noise ratio, (5) compactness, (6) reliability, and (7) no moving parts. The design is portable, can be fully automated, and is suitable for use in remote and harsh environments. A complete prototype instrument incorporates all optical components, mechanical mounts with flexible configuration options, custom electronic components, signal acquisition, computer control, data analysis, and a user interface, all integrated into a self-contained, user-friendly, system. It operates at fixed wavelength and incidence angle, though both can be changed by the operator in a few minutes as desired. Quantitative testing verified the absolute accuracy and suitability for monitoring real-time in-situ film growth and etching.",
author = "Stephen Ducharme and Hassanayn Machlab and Snyder, {Paul G.} and Woollam, {John A} and Synowicki, {Ron A.}",
year = "1996",
month = "12",
day = "1",
language = "English (US)",
isbn = "0819422274",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
pages = "373--384",
editor = "DePaula, {Ramon P.} and Berthold, {John W.III}",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - Self-calibrating modulation ellipsometer

AU - Ducharme, Stephen

AU - Machlab, Hassanayn

AU - Snyder, Paul G.

AU - Woollam, John A

AU - Synowicki, Ron A.

PY - 1996/12/1

Y1 - 1996/12/1

N2 - A new self-calibrating modulation ellipsometer (SCME) has demonstrated outstanding accuracy, utility, reliability, and speed. The ellipsometer is well suited to in-situ monitoring of surface degradation, film growth or etching, and quality control. The design incorporates several novel features including: (1) full self calibration, (2) high speed, (3) high accuracy, (4) high signal-to-noise ratio, (5) compactness, (6) reliability, and (7) no moving parts. The design is portable, can be fully automated, and is suitable for use in remote and harsh environments. A complete prototype instrument incorporates all optical components, mechanical mounts with flexible configuration options, custom electronic components, signal acquisition, computer control, data analysis, and a user interface, all integrated into a self-contained, user-friendly, system. It operates at fixed wavelength and incidence angle, though both can be changed by the operator in a few minutes as desired. Quantitative testing verified the absolute accuracy and suitability for monitoring real-time in-situ film growth and etching.

AB - A new self-calibrating modulation ellipsometer (SCME) has demonstrated outstanding accuracy, utility, reliability, and speed. The ellipsometer is well suited to in-situ monitoring of surface degradation, film growth or etching, and quality control. The design incorporates several novel features including: (1) full self calibration, (2) high speed, (3) high accuracy, (4) high signal-to-noise ratio, (5) compactness, (6) reliability, and (7) no moving parts. The design is portable, can be fully automated, and is suitable for use in remote and harsh environments. A complete prototype instrument incorporates all optical components, mechanical mounts with flexible configuration options, custom electronic components, signal acquisition, computer control, data analysis, and a user interface, all integrated into a self-contained, user-friendly, system. It operates at fixed wavelength and incidence angle, though both can be changed by the operator in a few minutes as desired. Quantitative testing verified the absolute accuracy and suitability for monitoring real-time in-situ film growth and etching.

UR - http://www.scopus.com/inward/record.url?scp=0030379926&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0030379926&partnerID=8YFLogxK

M3 - Conference contribution

SN - 0819422274

SN - 9780819422279

T3 - Proceedings of SPIE - The International Society for Optical Engineering

SP - 373

EP - 384

BT - Proceedings of SPIE - The International Society for Optical Engineering

A2 - DePaula, Ramon P.

A2 - Berthold, John W.III

ER -