Science and engineering in laser surface cleaning

Yongfeng Lu, W. D. Song, M. H. Hong, Z. M. Ren, Y. W. Zheng

Research output: Contribution to journalConference article

Abstract

Laser cleaning was demonstrated both theoretically and experimentally to be an effective cleaning technique for removing particulate and film-type contaminants from solid surfaces in this paper. The laser-induced removal of film-type contaminants from IC (Integrated Circuit) packages, IC mould, Printed Circuit Board and flexible circuit was studied. The cleaning models were established for removal of particles from substrate surfaces without and with a thin liquid layer by taking adhesion forces and cleaning force into account. The models not only explain the influence of laser fluence on cleaning efficiency, but also predict the cleaning thresholds. Laser-induced removal of particles from magnetic sliders and disk surfaces was investigated. Monitoring of laser cleaning by acoustic wave, electric field signal and particle counter was also addressed.

Original languageEnglish (US)
Pages (from-to)588-599
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4065
StatePublished - Jan 1 2000
EventHigh-Power Laser Ablation III - Santa Fe, NM, USA
Duration: Apr 24 2000Apr 28 2000

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Surface cleaning
Cleaning
cleaning
engineering
Laser
Engineering
Lasers
lasers
Integrated Circuits
integrated circuits
contaminants
Integrated circuits
Impurities
Printed Circuit Board
Radiation counters
radiation counters
printed circuits
circuit boards
Acoustic Waves
Adhesion

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Science and engineering in laser surface cleaning. / Lu, Yongfeng; Song, W. D.; Hong, M. H.; Ren, Z. M.; Zheng, Y. W.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 4065, 01.01.2000, p. 588-599.

Research output: Contribution to journalConference article

Lu, Yongfeng ; Song, W. D. ; Hong, M. H. ; Ren, Z. M. ; Zheng, Y. W. / Science and engineering in laser surface cleaning. In: Proceedings of SPIE - The International Society for Optical Engineering. 2000 ; Vol. 4065. pp. 588-599.
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