Scanning thermal microscopy and atomic force microscopy studies of laser-induced deposited metal lines

L. Zhou, G. Q. Xu, S. F.Y. Li, P. K.H. Ho, P. C. Zhang, K. D. Ye, W. J. Wang, Y. F. Lu

Research output: Contribution to journalArticle

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Abstract

Laser-induced deposition of palladium lines on glass from palladium acetate was systematically studied by scanning thermal microscopy and atomic force microscopy. The atomic force microscopy studies provide 3D images of deposited metal lines and fine structures on these metal lines. The scanning thermal microscope (SThM) allows mapping of thermal conductivity down to submicron scale. It is found that the deposited patterns, cross sectional profile and fine structures of these palladium lines are strongly dependent on laser power and laser scan speed. The mapping of the thermal property on submicron scale opens a way to obtain information which conventional scanning probe techniques, such as STM and AFM, are incapable of providing. SThM gives the evidence of an insulation layer (proposed to be PdO) of contamination above a certain threshold laser irradiation power. In the thermal conductivity mode, the larger thermal conductivity difference resulted in stronger contrast than the topographic difference. The lateral resolution for thermal conductivity image is less than 100 nm.

Original languageEnglish (US)
Pages (from-to)149-158
Number of pages10
JournalApplied Surface Science
Volume120
Issue number1-2
DOIs
StatePublished - Nov 1997

Fingerprint

Atomic force microscopy
Thermal conductivity
Microscopic examination
Palladium
thermal conductivity
Metals
atomic force microscopy
microscopy
Scanning
palladium
scanning
Lasers
metals
lasers
Microscopes
fine structure
microscopes
Laser beam effects
insulation
Insulation

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

Scanning thermal microscopy and atomic force microscopy studies of laser-induced deposited metal lines. / Zhou, L.; Xu, G. Q.; Li, S. F.Y.; Ho, P. K.H.; Zhang, P. C.; Ye, K. D.; Wang, W. J.; Lu, Y. F.

In: Applied Surface Science, Vol. 120, No. 1-2, 11.1997, p. 149-158.

Research output: Contribution to journalArticle

Zhou, L. ; Xu, G. Q. ; Li, S. F.Y. ; Ho, P. K.H. ; Zhang, P. C. ; Ye, K. D. ; Wang, W. J. ; Lu, Y. F. / Scanning thermal microscopy and atomic force microscopy studies of laser-induced deposited metal lines. In: Applied Surface Science. 1997 ; Vol. 120, No. 1-2. pp. 149-158.
@article{548f656e83364988b3e7857f361043ce,
title = "Scanning thermal microscopy and atomic force microscopy studies of laser-induced deposited metal lines",
abstract = "Laser-induced deposition of palladium lines on glass from palladium acetate was systematically studied by scanning thermal microscopy and atomic force microscopy. The atomic force microscopy studies provide 3D images of deposited metal lines and fine structures on these metal lines. The scanning thermal microscope (SThM) allows mapping of thermal conductivity down to submicron scale. It is found that the deposited patterns, cross sectional profile and fine structures of these palladium lines are strongly dependent on laser power and laser scan speed. The mapping of the thermal property on submicron scale opens a way to obtain information which conventional scanning probe techniques, such as STM and AFM, are incapable of providing. SThM gives the evidence of an insulation layer (proposed to be PdO) of contamination above a certain threshold laser irradiation power. In the thermal conductivity mode, the larger thermal conductivity difference resulted in stronger contrast than the topographic difference. The lateral resolution for thermal conductivity image is less than 100 nm.",
author = "L. Zhou and Xu, {G. Q.} and Li, {S. F.Y.} and Ho, {P. K.H.} and Zhang, {P. C.} and Ye, {K. D.} and Wang, {W. J.} and Lu, {Y. F.}",
year = "1997",
month = "11",
doi = "10.1016/S0169-4332(97)00231-6",
language = "English (US)",
volume = "120",
pages = "149--158",
journal = "Applied Surface Science",
issn = "0169-4332",
publisher = "Elsevier",
number = "1-2",

}

TY - JOUR

T1 - Scanning thermal microscopy and atomic force microscopy studies of laser-induced deposited metal lines

AU - Zhou, L.

AU - Xu, G. Q.

AU - Li, S. F.Y.

AU - Ho, P. K.H.

AU - Zhang, P. C.

AU - Ye, K. D.

AU - Wang, W. J.

AU - Lu, Y. F.

PY - 1997/11

Y1 - 1997/11

N2 - Laser-induced deposition of palladium lines on glass from palladium acetate was systematically studied by scanning thermal microscopy and atomic force microscopy. The atomic force microscopy studies provide 3D images of deposited metal lines and fine structures on these metal lines. The scanning thermal microscope (SThM) allows mapping of thermal conductivity down to submicron scale. It is found that the deposited patterns, cross sectional profile and fine structures of these palladium lines are strongly dependent on laser power and laser scan speed. The mapping of the thermal property on submicron scale opens a way to obtain information which conventional scanning probe techniques, such as STM and AFM, are incapable of providing. SThM gives the evidence of an insulation layer (proposed to be PdO) of contamination above a certain threshold laser irradiation power. In the thermal conductivity mode, the larger thermal conductivity difference resulted in stronger contrast than the topographic difference. The lateral resolution for thermal conductivity image is less than 100 nm.

AB - Laser-induced deposition of palladium lines on glass from palladium acetate was systematically studied by scanning thermal microscopy and atomic force microscopy. The atomic force microscopy studies provide 3D images of deposited metal lines and fine structures on these metal lines. The scanning thermal microscope (SThM) allows mapping of thermal conductivity down to submicron scale. It is found that the deposited patterns, cross sectional profile and fine structures of these palladium lines are strongly dependent on laser power and laser scan speed. The mapping of the thermal property on submicron scale opens a way to obtain information which conventional scanning probe techniques, such as STM and AFM, are incapable of providing. SThM gives the evidence of an insulation layer (proposed to be PdO) of contamination above a certain threshold laser irradiation power. In the thermal conductivity mode, the larger thermal conductivity difference resulted in stronger contrast than the topographic difference. The lateral resolution for thermal conductivity image is less than 100 nm.

UR - http://www.scopus.com/inward/record.url?scp=0031270623&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031270623&partnerID=8YFLogxK

U2 - 10.1016/S0169-4332(97)00231-6

DO - 10.1016/S0169-4332(97)00231-6

M3 - Article

AN - SCOPUS:0031270623

VL - 120

SP - 149

EP - 158

JO - Applied Surface Science

JF - Applied Surface Science

SN - 0169-4332

IS - 1-2

ER -