Scanning acoustic air microscope

T. Gudra, Z. Kojro, M. Schmachtl, C. Lier, M. Schubert, W. Grill

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

A new type of focusing transducer, which works efficiently in air, has been developed and employed in a phase sensitive scanning acoustic microscope (PSAM) with air as a coupling medium. The transducers contain a matching layer, which diminishes the insertion loss of the energy. The ultrasonic microscope working on the base of this transducer has a lateral resolution of about 220 μm and is capable of measuring distance (height of the object) variations with a resolution of at least 1 μn. The instrument is therefore capable of high resolution, non-contact topographical mapping of objects in air at normal conditions.

Original languageEnglish (US)
Pages (from-to)711-719
Number of pages9
JournalUltrasonics
Volume34
Issue number7
DOIs
StatePublished - Oct 1996

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transducers
microscopes
scanning
acoustics
air
acoustic microscopes
insertion loss
ultrasonics
high resolution
energy

Keywords

  • Scanning acoustic microscopy
  • Ultrasonic microscopy in air
  • Ultrasound

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

Cite this

Gudra, T., Kojro, Z., Schmachtl, M., Lier, C., Schubert, M., & Grill, W. (1996). Scanning acoustic air microscope. Ultrasonics, 34(7), 711-719. https://doi.org/10.1016/0041-624X(96)80003-C

Scanning acoustic air microscope. / Gudra, T.; Kojro, Z.; Schmachtl, M.; Lier, C.; Schubert, M.; Grill, W.

In: Ultrasonics, Vol. 34, No. 7, 10.1996, p. 711-719.

Research output: Contribution to journalArticle

Gudra, T, Kojro, Z, Schmachtl, M, Lier, C, Schubert, M & Grill, W 1996, 'Scanning acoustic air microscope', Ultrasonics, vol. 34, no. 7, pp. 711-719. https://doi.org/10.1016/0041-624X(96)80003-C
Gudra T, Kojro Z, Schmachtl M, Lier C, Schubert M, Grill W. Scanning acoustic air microscope. Ultrasonics. 1996 Oct;34(7):711-719. https://doi.org/10.1016/0041-624X(96)80003-C
Gudra, T. ; Kojro, Z. ; Schmachtl, M. ; Lier, C. ; Schubert, M. ; Grill, W. / Scanning acoustic air microscope. In: Ultrasonics. 1996 ; Vol. 34, No. 7. pp. 711-719.
@article{98a7a430228447178860cbc527ae8708,
title = "Scanning acoustic air microscope",
abstract = "A new type of focusing transducer, which works efficiently in air, has been developed and employed in a phase sensitive scanning acoustic microscope (PSAM) with air as a coupling medium. The transducers contain a matching layer, which diminishes the insertion loss of the energy. The ultrasonic microscope working on the base of this transducer has a lateral resolution of about 220 μm and is capable of measuring distance (height of the object) variations with a resolution of at least 1 μn. The instrument is therefore capable of high resolution, non-contact topographical mapping of objects in air at normal conditions.",
keywords = "Scanning acoustic microscopy, Ultrasonic microscopy in air, Ultrasound",
author = "T. Gudra and Z. Kojro and M. Schmachtl and C. Lier and M. Schubert and W. Grill",
year = "1996",
month = "10",
doi = "10.1016/0041-624X(96)80003-C",
language = "English (US)",
volume = "34",
pages = "711--719",
journal = "Ultrasonics",
issn = "0041-624X",
publisher = "Elsevier",
number = "7",

}

TY - JOUR

T1 - Scanning acoustic air microscope

AU - Gudra, T.

AU - Kojro, Z.

AU - Schmachtl, M.

AU - Lier, C.

AU - Schubert, M.

AU - Grill, W.

PY - 1996/10

Y1 - 1996/10

N2 - A new type of focusing transducer, which works efficiently in air, has been developed and employed in a phase sensitive scanning acoustic microscope (PSAM) with air as a coupling medium. The transducers contain a matching layer, which diminishes the insertion loss of the energy. The ultrasonic microscope working on the base of this transducer has a lateral resolution of about 220 μm and is capable of measuring distance (height of the object) variations with a resolution of at least 1 μn. The instrument is therefore capable of high resolution, non-contact topographical mapping of objects in air at normal conditions.

AB - A new type of focusing transducer, which works efficiently in air, has been developed and employed in a phase sensitive scanning acoustic microscope (PSAM) with air as a coupling medium. The transducers contain a matching layer, which diminishes the insertion loss of the energy. The ultrasonic microscope working on the base of this transducer has a lateral resolution of about 220 μm and is capable of measuring distance (height of the object) variations with a resolution of at least 1 μn. The instrument is therefore capable of high resolution, non-contact topographical mapping of objects in air at normal conditions.

KW - Scanning acoustic microscopy

KW - Ultrasonic microscopy in air

KW - Ultrasound

UR - http://www.scopus.com/inward/record.url?scp=0030263348&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0030263348&partnerID=8YFLogxK

U2 - 10.1016/0041-624X(96)80003-C

DO - 10.1016/0041-624X(96)80003-C

M3 - Article

AN - SCOPUS:0030263348

VL - 34

SP - 711

EP - 719

JO - Ultrasonics

JF - Ultrasonics

SN - 0041-624X

IS - 7

ER -