Room temperature synthesis of c-AIN thin films by nitrogen-ion-assisted pulsed laser deposition

Z. M. Ren, Y. F. Lu, H. Q. Ni, T. Y.F. Liew, B. A. Cheong, S. K. Chow, M. L. Ng, J. P. Wang

Research output: Contribution to journalArticle

38 Citations (Scopus)

Abstract

Cubic aluminum nitride (c-AIN) thin films have been deposited at room temperature on silicon substrates by nitrogen-ion-assisted pulsed laser ablation of a hexagonal AlN target. The deposited thin films exhibit good crystal properties with sharp x-ray diffraction peaks. The influences of the nitrogen ion energy on the morphological, compositional, and electronic properties of the AlN thin films have been studied. The nitrogen ions can effectively promote the formation of Al-N bonds and improve the crystal properties of the deposited thin films. A nitrogen ion energy of 400 eV is proposed to deposit high quality c-AIN thin films.

Original languageEnglish (US)
Pages (from-to)7346-7350
Number of pages5
JournalJournal of Applied Physics
Volume88
Issue number12
DOIs
StatePublished - Dec 15 2000

Fingerprint

nitrogen ions
aluminum nitrides
pulsed laser deposition
room temperature
synthesis
thin films
laser ablation
crystals
pulsed lasers
x ray diffraction
deposits
energy
silicon
electronics

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Ren, Z. M., Lu, Y. F., Ni, H. Q., Liew, T. Y. F., Cheong, B. A., Chow, S. K., ... Wang, J. P. (2000). Room temperature synthesis of c-AIN thin films by nitrogen-ion-assisted pulsed laser deposition. Journal of Applied Physics, 88(12), 7346-7350. https://doi.org/10.1063/1.1320010

Room temperature synthesis of c-AIN thin films by nitrogen-ion-assisted pulsed laser deposition. / Ren, Z. M.; Lu, Y. F.; Ni, H. Q.; Liew, T. Y.F.; Cheong, B. A.; Chow, S. K.; Ng, M. L.; Wang, J. P.

In: Journal of Applied Physics, Vol. 88, No. 12, 15.12.2000, p. 7346-7350.

Research output: Contribution to journalArticle

Ren, ZM, Lu, YF, Ni, HQ, Liew, TYF, Cheong, BA, Chow, SK, Ng, ML & Wang, JP 2000, 'Room temperature synthesis of c-AIN thin films by nitrogen-ion-assisted pulsed laser deposition', Journal of Applied Physics, vol. 88, no. 12, pp. 7346-7350. https://doi.org/10.1063/1.1320010
Ren, Z. M. ; Lu, Y. F. ; Ni, H. Q. ; Liew, T. Y.F. ; Cheong, B. A. ; Chow, S. K. ; Ng, M. L. ; Wang, J. P. / Room temperature synthesis of c-AIN thin films by nitrogen-ion-assisted pulsed laser deposition. In: Journal of Applied Physics. 2000 ; Vol. 88, No. 12. pp. 7346-7350.
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