Recent progress on the modeling of laser surface cleaning

Yongfeng Lu, W. D. Song, B. S. Lukyanchuk, M. H. Hong, W. Y. Zheng

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

Laser cleaning has emerged to effectively remove contaminants from solid surfaces. In this paper, recent progress on laser cleaning has been studied. First, a cleaning model is established for removal of particles from substrate surfaces. The model not only explains the influence of fluence on cleaning efficiency, but also predicts the cleaning thresholds. Following that, the optical resonance and near field effect are discussed for transparent particles with a size of a ∼ λ (radiation wavelength) which strongly influences the intensity distribution in the contacted area (substrate surface). The characterization of ejected particles during laser cleaning is finally investigated. It is found that the particle distribution curves closely fit to Gaussian curve.

Original languageEnglish (US)
JournalMaterials Research Society Symposium - Proceedings
Volume617
StatePublished - Dec 1 2000
EventLaser-Solid Interactions for Materials Processing - San Francisco, CA, United States
Duration: Apr 25 2000Apr 27 2000

Fingerprint

Surface cleaning
cleaning
Cleaning
Lasers
lasers
optical resonance
Substrates
curves
solid surfaces
contaminants
near fields
fluence
Impurities
Radiation
Wavelength
thresholds
radiation
wavelengths

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Lu, Y., Song, W. D., Lukyanchuk, B. S., Hong, M. H., & Zheng, W. Y. (2000). Recent progress on the modeling of laser surface cleaning. Materials Research Society Symposium - Proceedings, 617.

Recent progress on the modeling of laser surface cleaning. / Lu, Yongfeng; Song, W. D.; Lukyanchuk, B. S.; Hong, M. H.; Zheng, W. Y.

In: Materials Research Society Symposium - Proceedings, Vol. 617, 01.12.2000.

Research output: Contribution to journalConference article

Lu, Yongfeng ; Song, W. D. ; Lukyanchuk, B. S. ; Hong, M. H. ; Zheng, W. Y. / Recent progress on the modeling of laser surface cleaning. In: Materials Research Society Symposium - Proceedings. 2000 ; Vol. 617.
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