Quantitative elastic-property information with acoustic AFM: Measurements and modeling

Donna C. Hurley, Joshua S. Wiehn, Joseph A. Turner, Paul Rice

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

To investigate nanoscale mechanical behavior, new approaches using dynamic modes of the atomic force microscope cantilever are being developed. One method, atomic force acoustic microscopy (AFAM), measures cantilever resonances in the acoustic-frequency range to obtain elastic-property information. We describe quantitative AFAM measurements and compare them to results from techniques like surface acoustic waves and instrumented indentation. With AFAM we examined a niobium film using two separate calibration samples and two cantilever geometries. Depending on the cantilever type we found MNb=105-114 GPa, in good agreement with literature values of MNb=116-133 GPa for bulk niobium and MNb=120±5 GPa obtained with surface acoustic waves. We also obtained AFAM values of M=54-81 GPa for the indentation modulus of an aluminum film. In comparison, literature values for bulk aluminum are MAl=76-81 GPa, while other results on the same film yielded MAl=78-85 GPa. To understand the results more thoroughly, we compare two methods of AFAM spectrum analysis. The analytical approach assumes a cantilever of uniform rectangular cross-section while the finite element model accounts for spatial variations in cantilever dimensions. The same data are interpreted with the two approaches to better understand measurement uncertainty and accuracy.

Original languageEnglish (US)
Pages (from-to)65-73
Number of pages9
JournalProceedings of SPIE-The International Society for Optical Engineering
Volume4703
DOIs
StatePublished - Jan 1 2002

Fingerprint

Cantilever
Elastic Properties
Acoustics
Microscopy
elastic properties
atomic force microscopy
Niobium
acoustics
Modeling
microscopy
Surface Acoustic Wave
Aluminum
Indentation
Surface waves
Acoustic waves
indentation
niobium
Spectrum Analysis
Measurement Uncertainty
Atomic Force Microscope

Keywords

  • Atomic force acoustic microscopy
  • Elastic properties
  • Thin films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Quantitative elastic-property information with acoustic AFM : Measurements and modeling. / Hurley, Donna C.; Wiehn, Joshua S.; Turner, Joseph A.; Rice, Paul.

In: Proceedings of SPIE-The International Society for Optical Engineering, Vol. 4703, 01.01.2002, p. 65-73.

Research output: Contribution to journalArticle

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