Pulsed laser deposition of hydrogenated amorphous carbon films from a polymeric target

S. M. Huang, Y. F. Lu, Z. Sun

Research output: Contribution to journalConference article

Abstract

The phenylcarbyne polymer possesses a diamond-like structure. Because of its special structure, this polymer can be converted into diamond-like carbon phases at atmospheric pressure by thermal decomposition. In this article, we report on the growth of hydrogenated amorphous carbon films (a-C:H) films by pulsed laser (KrF excimer, λ = 248 nm) ablation of a phenylcarbyne polymer target under vacuum. a-C:H films were deposited with various laser fluences and at different substrate temperatures. Chemical and structural characteristics of these films were analyzed using X-ray-excited Auger electron spectroscopy (XAES), photoelectron loss spectroscopy (PELS), and Raman spectroscopy. It was found that the fourfold-coordinated component increases with laser fluence at 80 °C or increases with temperature increasing from 25 °C to 60 °C at a fluence of 1×109 W/cm2. When the deposition temperature is increased from 60 °C to 200 °C at a fluence of 1×109 W/cm2, the graphitic component increases. The variation in chemical structures of these films is explained in terms of the changes in the fraction of sp2-bonded clusters and changes in the termination of the graphitic clusters and sp3-bonded networks by hydrogen in the a-C:H films.

Original languageEnglish (US)
Pages (from-to)478-486
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3933
StatePublished - Jan 1 2000
EventLaser Applications in Microelectronic and Optoelectronic Manufacturing V - San Jose, CA, USA
Duration: Jan 24 2000Jan 26 2000

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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