Pulsed-laser assisted nanopatterning of metallic layers combined with atomic force microscopy

S. M. Huang, M. H. Hong, Y. F. Lu, B. S. Lukỳanchuk, W. D. Song, T. C. Chong

Research output: Contribution to journalArticle

93 Citations (Scopus)

Abstract

Pulsed-laser assisted nanopatterning of metallic layers on silicon substrates under an atomic force microscope (AFM) tip has been investigated. A 532 nm Nd:YAG pulsed laser with a pulse duration of 7 ns was used. Boron doped silicon tips were used in contact mode. This technique enables processing of structures with a lateral resolution down to 10 nm on the copper layers. Nanopatterns such as pit array and multilines with lateral dimensions between 10 and 60 nm and depths between 1.5 and 7.0 nm have been created. The experimental results and mechanism of the nanostructure formation are discussed. The created features were characterized by AFM, scanning electron microscope and Auger electron spectroscopy. The apparent depth of the created pit has been studied as a function of laser intensity or laser pulse numbers. Dependence of nanoprocessing on the geometry parameters of the tip and on the optical and thermal properties of the processed sample has also been investigated. Thermal expansion of the tip, the field enhancement factor underneath the tip, and the sample surface heating were estimated. It is proposed that field-enhancement mechanism is the dominant reason for this nanoprocessing.

Original languageEnglish (US)
Pages (from-to)3268-3274
Number of pages7
JournalJournal of Applied Physics
Volume91
Issue number5
DOIs
StatePublished - Feb 15 2002

Fingerprint

pulsed lasers
atomic force microscopy
microscopes
augmentation
silicon
Auger spectroscopy
lasers
electron spectroscopy
YAG lasers
thermal expansion
pulse duration
boron
thermodynamic properties
electron microscopes
optical properties
copper
heating
scanning
geometry
pulses

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Pulsed-laser assisted nanopatterning of metallic layers combined with atomic force microscopy. / Huang, S. M.; Hong, M. H.; Lu, Y. F.; Lukỳanchuk, B. S.; Song, W. D.; Chong, T. C.

In: Journal of Applied Physics, Vol. 91, No. 5, 15.02.2002, p. 3268-3274.

Research output: Contribution to journalArticle

Huang, S. M. ; Hong, M. H. ; Lu, Y. F. ; Lukỳanchuk, B. S. ; Song, W. D. ; Chong, T. C. / Pulsed-laser assisted nanopatterning of metallic layers combined with atomic force microscopy. In: Journal of Applied Physics. 2002 ; Vol. 91, No. 5. pp. 3268-3274.
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