Progresses in carbon nitride synthesis by pulsed laser deposition

Z. M. Ren, Yongfeng Lu, Z. F. He

Research output: Contribution to journalArticle

Abstract

Synthesis of carbon nitride has been an important topic in materials science since 1993. Ion-assisted pulsed laser deposition is proven to be a good method to deposit carbon nitride thin films. Both amorphous and crystal β-C3N4 layers can be deposited on many substrates. A standard experimental set-up comprises a pulsed KrF excimer laser (wavelength 248 nm, duration ∼30 ns) that is used to ablate the graphite target and a nitrogen ion beam bombarding simultaneously on the substrate. A variety of experimental derivatives have been developed based on pulsed laser deposition. The deposited thin films have been characterized by Auger Electron Spectroscope (AES), X-ray Photoelectron Spectroscopy (XPS), Mass Time of Flight spectrum (TOF), Optical Emission Spectrum (OES), Rutherford Backscattering (RBS), High Energy Backscattering (HEBS), Raman spectroscopy, Fourier Transform Infra-red Spectroscopy (FTIR), Ellipsometry, Electron Diffraction, Scanning Tunnelling Microscope (STM) and Atomic force microscope (AFM). Investigations are carried out to identify the binding structure, nitrogen content, electronic properties, optical properties and crystal structures of the deposited thin films.

Original languageEnglish (US)
Pages (from-to)249-256
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4157
DOIs
StatePublished - Jan 1 2001

Fingerprint

Pulsed Laser Deposition
carbon nitrides
Nitrides
Carbon nitride
Pulsed laser deposition
pulsed laser deposition
Thin Films
Carbon
Backscattering
Synthesis
Thin films
Nitrogen
backscattering
Microscopes
synthesis
thin films
microscopes
Substrate
Electron
Ellipsometry

Keywords

  • Carbon nitride
  • Ion-assisted
  • Laser ablation
  • Thin films
  • β-CN

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Progresses in carbon nitride synthesis by pulsed laser deposition. / Ren, Z. M.; Lu, Yongfeng; He, Z. F.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 4157, 01.01.2001, p. 249-256.

Research output: Contribution to journalArticle

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