Progress in spectroscopic ellipsometry

Applications from vacuum ultraviolet to infrared

James N. Hilfiker, Corey L. Bungay, Ron A. Synowicki, Thomas E. Tiwald, Craig M. Herzinger, Blaine Johs, Greg K. Pribil, John A Woollam

Research output: Contribution to journalArticle

51 Citations (Scopus)

Abstract

Spectroscopic ellipsometry has been applied to a diverse range of applications pertaining to thin film and bulk material characterization. Traditionally, SE characterization was applied across the UV, visible, and NIR wavelength ranges. New developments have extended the available range to both the VUV and IR. Applications of SE that utilize wavelength-specific information are reviewed. In addition, the wavelength regions are discussed with a survey of application progress in these areas.

Original languageEnglish (US)
Pages (from-to)1103-1108
Number of pages6
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume21
Issue number4
DOIs
StatePublished - Jul 1 2003

Fingerprint

Spectroscopic ellipsometry
ellipsometry
Vacuum
Infrared radiation
Wavelength
vacuum
wavelengths
Thin films
thin films

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

Progress in spectroscopic ellipsometry : Applications from vacuum ultraviolet to infrared. / Hilfiker, James N.; Bungay, Corey L.; Synowicki, Ron A.; Tiwald, Thomas E.; Herzinger, Craig M.; Johs, Blaine; Pribil, Greg K.; Woollam, John A.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 21, No. 4, 01.07.2003, p. 1103-1108.

Research output: Contribution to journalArticle

Hilfiker, James N. ; Bungay, Corey L. ; Synowicki, Ron A. ; Tiwald, Thomas E. ; Herzinger, Craig M. ; Johs, Blaine ; Pribil, Greg K. ; Woollam, John A. / Progress in spectroscopic ellipsometry : Applications from vacuum ultraviolet to infrared. In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 2003 ; Vol. 21, No. 4. pp. 1103-1108.
@article{2a7a90cc6c6944f29e2536bc55260bee,
title = "Progress in spectroscopic ellipsometry: Applications from vacuum ultraviolet to infrared",
abstract = "Spectroscopic ellipsometry has been applied to a diverse range of applications pertaining to thin film and bulk material characterization. Traditionally, SE characterization was applied across the UV, visible, and NIR wavelength ranges. New developments have extended the available range to both the VUV and IR. Applications of SE that utilize wavelength-specific information are reviewed. In addition, the wavelength regions are discussed with a survey of application progress in these areas.",
author = "Hilfiker, {James N.} and Bungay, {Corey L.} and Synowicki, {Ron A.} and Tiwald, {Thomas E.} and Herzinger, {Craig M.} and Blaine Johs and Pribil, {Greg K.} and Woollam, {John A}",
year = "2003",
month = "7",
day = "1",
doi = "10.1116/1.1569928",
language = "English (US)",
volume = "21",
pages = "1103--1108",
journal = "Journal of Vacuum Science and Technology A",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "4",

}

TY - JOUR

T1 - Progress in spectroscopic ellipsometry

T2 - Applications from vacuum ultraviolet to infrared

AU - Hilfiker, James N.

AU - Bungay, Corey L.

AU - Synowicki, Ron A.

AU - Tiwald, Thomas E.

AU - Herzinger, Craig M.

AU - Johs, Blaine

AU - Pribil, Greg K.

AU - Woollam, John A

PY - 2003/7/1

Y1 - 2003/7/1

N2 - Spectroscopic ellipsometry has been applied to a diverse range of applications pertaining to thin film and bulk material characterization. Traditionally, SE characterization was applied across the UV, visible, and NIR wavelength ranges. New developments have extended the available range to both the VUV and IR. Applications of SE that utilize wavelength-specific information are reviewed. In addition, the wavelength regions are discussed with a survey of application progress in these areas.

AB - Spectroscopic ellipsometry has been applied to a diverse range of applications pertaining to thin film and bulk material characterization. Traditionally, SE characterization was applied across the UV, visible, and NIR wavelength ranges. New developments have extended the available range to both the VUV and IR. Applications of SE that utilize wavelength-specific information are reviewed. In addition, the wavelength regions are discussed with a survey of application progress in these areas.

UR - http://www.scopus.com/inward/record.url?scp=0043032523&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0043032523&partnerID=8YFLogxK

U2 - 10.1116/1.1569928

DO - 10.1116/1.1569928

M3 - Article

VL - 21

SP - 1103

EP - 1108

JO - Journal of Vacuum Science and Technology A

JF - Journal of Vacuum Science and Technology A

SN - 0734-2101

IS - 4

ER -