Preparation of (0 0 1)-oriented PZT thin films on silicon wafers using pulsed laser deposition

Jing Zhao, Li Lu, C. V. Thompson, Y. F. Lu, W. D. Song

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

Completely (0 0 1)-oriented Pb(Zr0.52Ti0.48)O3 (PZT) thin films deposited on (1 0 0)-silicon wafers with SrTiO3 (STO)/MgO as a buffer layer system and YBCO as a electrode, were prepared by using KrF excimer pulsed-laser deposition. The epitaxial relationships, i.e. PZT(0 0 1)∥YBCO(0 0 1)∥SrTiO3(1 0 0)∥MgO(1 0 0)∥Si(1 0 0) and PZT(1 1 0) ∥YBCO(1 1 0)∥SrTiO3(0 1 1)∥MgO(0 1 1) were detected using X-ray θ-2θ scans and pole figures or φ-scans. Grain size and surface morphologies of the as-prepared films were examined using atomic force microscopy and scanning electron microscopy.

Original languageEnglish (US)
Pages (from-to)173-177
Number of pages5
JournalJournal of Crystal Growth
Volume225
Issue number2-4
DOIs
StatePublished - May 2001

Fingerprint

Excimer lasers
Buffer layers
Pulsed laser deposition
Silicon wafers
excimer lasers
pulsed laser deposition
Surface morphology
Poles
Atomic force microscopy
poles
buffers
grain size
atomic force microscopy
wafers
X rays
Thin films
preparation
Scanning electron microscopy
Electrodes
scanning electron microscopy

Keywords

  • A3. Laser epitaxy
  • A3. Pulsed laser deposition

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

Cite this

Preparation of (0 0 1)-oriented PZT thin films on silicon wafers using pulsed laser deposition. / Zhao, Jing; Lu, Li; Thompson, C. V.; Lu, Y. F.; Song, W. D.

In: Journal of Crystal Growth, Vol. 225, No. 2-4, 05.2001, p. 173-177.

Research output: Contribution to journalArticle

Zhao, Jing ; Lu, Li ; Thompson, C. V. ; Lu, Y. F. ; Song, W. D. / Preparation of (0 0 1)-oriented PZT thin films on silicon wafers using pulsed laser deposition. In: Journal of Crystal Growth. 2001 ; Vol. 225, No. 2-4. pp. 173-177.
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