Phase and microstructure investigations of boron nitride thin films by spectroscopic ellipsometry in the visible and infrared spectral range

Eva Franke, Mathias Schubert, Horst Neumann, Thomas E. Tiwald, Daniel W. Thompson, John A Woollam, Jens Hahn, Frank Richter

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

Spectroscopic ellipsometry over the spectral range from 700 to 3000 cm-1 and from 1.5 to 3.5 eV is used to simultaneously determine phase and microstructure of polycrystalline hexagonal and cubic boron nitride thin films deposited by magnetron sputtering on (100) silicon. The results are obtained from a single microstructure-dependent model for both infrared and visible-light thin-film anisotropic dielectric functions. The optical behavior of high c-BN content thin films is described by an effective medium approximation. We obtain the amount of h-BN within high c-BN content thin films. A thin oriented nucleation layer between the silicon substrate and the high c-BN content layer is demonstrated. The preferential arrangement of the grain c axes within the h-BN thin films are found to be dependent on the growth parameters. The results from the infrared and visible spectral range ellipsometry model are compared to each other and found to be highly consistent.

Original languageEnglish (US)
Pages (from-to)2906-2911
Number of pages6
JournalJournal of Applied Physics
Volume82
Issue number6
DOIs
StatePublished - Sep 15 1997

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boron nitrides
ellipsometry
microstructure
thin films
silicon
magnetron sputtering
nucleation
approximation

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Phase and microstructure investigations of boron nitride thin films by spectroscopic ellipsometry in the visible and infrared spectral range. / Franke, Eva; Schubert, Mathias; Neumann, Horst; Tiwald, Thomas E.; Thompson, Daniel W.; Woollam, John A; Hahn, Jens; Richter, Frank.

In: Journal of Applied Physics, Vol. 82, No. 6, 15.09.1997, p. 2906-2911.

Research output: Contribution to journalArticle

Franke, Eva ; Schubert, Mathias ; Neumann, Horst ; Tiwald, Thomas E. ; Thompson, Daniel W. ; Woollam, John A ; Hahn, Jens ; Richter, Frank. / Phase and microstructure investigations of boron nitride thin films by spectroscopic ellipsometry in the visible and infrared spectral range. In: Journal of Applied Physics. 1997 ; Vol. 82, No. 6. pp. 2906-2911.
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